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Yasuo Kakizaki
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Kanagawa, JP
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Patents Grants
last 30 patents
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Patent Grant
Substrate manufacturing method and substrate processing apparatus
Patent number
7,256,104
Issue date
Aug 14, 2007
Canon Kabushiki Kaisha
Masataka Ito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate manufacturing method
Patent number
7,008,860
Issue date
Mar 7, 2006
Canon Kabushiki Kaisha
Yasuo Kakizaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process for producing semiconductor article
Patent number
6,326,279
Issue date
Dec 4, 2001
Canon Kabushiki Kaisha
Yasuo Kakizaki
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20070190746
Publication date
Aug 16, 2007
Canon Kabushiki Kaisha
Masataka Ito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate manufacturing method and substrate processing apparatus
Publication number
20040259328
Publication date
Dec 23, 2004
Canon Kabushiki Kaisha
Masataka Ito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate manufacturing method
Publication number
20040185638
Publication date
Sep 23, 2004
Canon Kabushiki Kaisha
Yasuo Kakizaki
H01 - BASIC ELECTRIC ELEMENTS