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Yokohama, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Multi-beam writing method and multi-beam writing apparatus
Patent number
11,869,746
Issue date
Jan 9, 2024
NuFlare Technology, Inc.
Hiroshi Matsumoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multiple charged particle beam writing apparatus and multiple charg...
Patent number
11,556,061
Issue date
Jan 17, 2023
NuFlare Technology, Inc.
Yasuo Kato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam writing method and charged particle beam writ...
Patent number
11,443,918
Issue date
Sep 13, 2022
NuFlare Technology, Inc.
Kenichi Yasui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi charged particle beam writing apparatus and multi charged par...
Patent number
10,937,629
Issue date
Mar 2, 2021
NuFlare Technology, Inc.
Hironori Teguri
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of creating writing data
Patent number
10,503,860
Issue date
Dec 10, 2019
NuFlare Technology, Inc.
Shigehiro Hara
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
Patent number
RE47707
Issue date
Nov 5, 2019
NuFlare Technology, Inc.
Yasuo Kato
Information
Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
Patent number
10,381,194
Issue date
Aug 13, 2019
NuFlare Technology, Inc.
Yasuo Kato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multiple charged particle beam lithography apparatus and multiple c...
Patent number
10,248,031
Issue date
Apr 2, 2019
NuFlare Technology, Inc.
Yasuo Kato
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Drawing data creation method and charged particle beam drawing appa...
Patent number
10,199,199
Issue date
Feb 5, 2019
NuFlare Technology, Inc.
Shigehiro Hara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
Patent number
10,199,200
Issue date
Feb 5, 2019
NuFlare Technology, Inc.
Yasuo Kato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi charged particle beam writing apparatus, and multi charged pa...
Patent number
10,134,562
Issue date
Nov 20, 2018
NuFlare Technology, Inc.
Yasuo Kato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for generating writing data
Patent number
9,984,853
Issue date
May 29, 2018
NuFlare Technology, Inc.
Shigehiro Hara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi charged particle beam writing apparatus and multi charged par...
Patent number
9,934,935
Issue date
Apr 3, 2018
NuFlare Technology, Inc.
Ryoichi Yoshikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
Patent number
9,899,187
Issue date
Feb 20, 2018
NuFlare Technology, Inc.
Yasuo Kato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi charged particle beam writing apparatus and multi charged par...
Patent number
9,852,876
Issue date
Dec 26, 2017
NuFlare Technology, Inc.
Yasuo Kato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam writing apparatus and method utilizing a sum...
Patent number
9,837,247
Issue date
Dec 5, 2017
NuFlare Technology Co., Inc.
Yasuo Kato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam drawing apparatus and drawing data generation...
Patent number
9,779,913
Issue date
Oct 3, 2017
NuFlare Technology, Inc.
Shigehiro Hara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multiple charged particle beam lithography apparatus and multiple c...
Patent number
9,601,315
Issue date
Mar 21, 2017
NuFlare Technology, Inc.
Ryoh Kawana
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam writing apparatus, and buffer memory data sto...
Patent number
9,564,293
Issue date
Feb 7, 2017
NuFlare Technology, Inc.
Jun Yashima
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Charged particle beam writing apparatus, and charged particle beam...
Patent number
9,484,185
Issue date
Nov 1, 2016
NuFlare Technology, Inc.
Mizuna Suganuma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi charged particle beam writing apparatus and multi charged par...
Patent number
9,336,994
Issue date
May 10, 2016
NuFlare Technology, Inc.
Yasuo Kato
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Charged particle beam writing apparatus and method for acquiring do...
Patent number
9,224,578
Issue date
Dec 29, 2015
NuFlare Technology, Inc.
Noriaki Nakayamada
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Charged particle beam lithography apparatus, inspection apparatus a...
Patent number
9,164,044
Issue date
Oct 20, 2015
NuFlare Technology, Inc.
Shigehiro Hara
G01 - MEASURING TESTING
Information
Patent Grant
Charged particle beam writing apparatus and irradiation time apport...
Patent number
9,141,750
Issue date
Sep 22, 2015
Nuflare Technology, Inc.
Jun Yashima
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
Patent number
9,063,440
Issue date
Jun 23, 2015
Nuflare Technology, Inc.
Yasuo Kato
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
Patent number
8,872,141
Issue date
Oct 28, 2014
Nuflare Technology, Inc.
Yasuo Kato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
Patent number
8,552,405
Issue date
Oct 8, 2013
Nuflare Technology, Inc.
Yasuo Kato
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Charged particle beam drawing apparatus and method
Patent number
8,481,964
Issue date
Jul 9, 2013
Nuflare Technology, Inc.
Yasuo Kato
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Charged particle beam drawing apparatus and control method thereof
Patent number
8,466,440
Issue date
Jun 18, 2013
Nuflare Technology, Inc.
Jun Yashima
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Communication system
Patent number
8,340,575
Issue date
Dec 25, 2012
Kaiser Technology, Inc.
Yasuo Kato
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Patents Applications
last 30 patents
Information
Patent Application
MULTIPLE CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTIPLE CHARG...
Publication number
20240429022
Publication date
Dec 26, 2024
NuFlare Technology, Inc.
Yasuo KATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-CHARGED PARTICLE BEAM WRITING APPARATUS, AND MULTI-CHARGED PA...
Publication number
20240242932
Publication date
Jul 18, 2024
NuFlare Technology, Inc.
Yasuo KATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COVERAGE CALCULATING METHOD, CHARGED PARTICLE BEAM WRITING METHOD,...
Publication number
20230369015
Publication date
Nov 16, 2023
NuFlare Technology, Inc.
Kenichi YASUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-CHARGED PARTICLE BEAM WRITING APPARATUS, AND MULTI-CHARGED PA...
Publication number
20230187172
Publication date
Jun 15, 2023
NuFlare Technology, Inc.
Yasuo KATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI-CHARGED PAR...
Publication number
20230095091
Publication date
Mar 30, 2023
NuFlare Technology, Inc.
Yasuo KATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTIPLE CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTIPLE CHARG...
Publication number
20220107569
Publication date
Apr 7, 2022
NuFlare Technology, Inc.
Yasuo KATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-BEAM WRITING METHOD AND MULTI-BEAM WRITING APPARATUS
Publication number
20210027987
Publication date
Jan 28, 2021
NuFlare Technology, Inc.
Hiroshi MATSUMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING METHOD AND CHARGED PARTICLE BEAM WRIT...
Publication number
20200357604
Publication date
Nov 12, 2020
NuFlare Technology, Inc.
Kenichi YASUI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...
Publication number
20200118791
Publication date
Apr 16, 2020
NuFlare Technology, Inc.
Hironori TEGURI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
Publication number
20190122857
Publication date
Apr 25, 2019
NuFlare Technology, Inc.
Yasuo Kato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTIPLE CHARGED PARTICLE BEAM LITHOGRAPHY APPARATUS AND MULTIPLE C...
Publication number
20180307144
Publication date
Oct 25, 2018
NuFlare Technology, Inc.
Yasuo Kato
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF CREATING WRITING DATA
Publication number
20180285505
Publication date
Oct 4, 2018
NuFlare Technology, Inc.
Shigehiro Hara
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
Publication number
20180061614
Publication date
Mar 1, 2018
NuFlare Technology, Inc.
Yasuo Kato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...
Publication number
20170229280
Publication date
Aug 10, 2017
NuFlare Technology, Inc.
Yasuo KATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...
Publication number
20170047194
Publication date
Feb 16, 2017
NuFlare Technology, Inc.
Ryoichi YOSHIKAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DRAWING DATA CREATION METHOD AND CHARGED PARTICLE BEAM DRAWING APPA...
Publication number
20170018404
Publication date
Jan 19, 2017
NuFlare Technology, Inc.
Shigehiro HARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
Publication number
20160314933
Publication date
Oct 27, 2016
NuFlare Technology, Inc.
Yasuo KATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM DRAWING APPARATUS AND DRAWING DATA GENERATION...
Publication number
20160284510
Publication date
Sep 29, 2016
NuFlare Technology, Inc.
Shigehiro HARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS, AND MULTI CHARGED PA...
Publication number
20160181062
Publication date
Jun 23, 2016
NuFlare Technology, Inc.
Yasuo KATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR GENERATING WRITING DATA
Publication number
20160155609
Publication date
Jun 2, 2016
NuFlare Technology, Inc.
Shigehiro HARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTIPLE CHARGED PARTICLE BEAM LITHOGRAPHY APPARATUS AND MULTIPLE C...
Publication number
20160155610
Publication date
Jun 2, 2016
NuFlare Technology, Inc.
Ryoh KAWANA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS, AND CHARGED PARTICLE BEAM...
Publication number
20160148785
Publication date
May 26, 2016
NuFlare Technology, Inc.
Mizuna SUGANUMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...
Publication number
20150194289
Publication date
Jul 9, 2015
NuFlare Technology, Inc.
Yasuo KATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
Publication number
20150041684
Publication date
Feb 12, 2015
NuFlare Technology, Inc.
Yasuo Kato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND METHOD FOR ACQUIRING DO...
Publication number
20140291553
Publication date
Oct 2, 2014
NuFlare Technology, Inc.
Noriaki NAKAYAMADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS, AND BUFFER MEMORY DATA STO...
Publication number
20140237196
Publication date
Aug 21, 2014
NuFlare Technology, Inc.
Jun Yashima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM D...
Publication number
20140138527
Publication date
May 22, 2014
NuFlare Technology, Inc.
Yasuo KATO
B82 - NANO-TECHNOLOGY
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND IRRADIATION TIME APPORT...
Publication number
20140017349
Publication date
Jan 16, 2014
Jun Yashima
B82 - NANO-TECHNOLOGY
Information
Patent Application
CHARGED PARTICLE BEAM LITHOGRAPHY APPARATUS, INSPECTION APPARATUS A...
Publication number
20130264478
Publication date
Oct 10, 2013
NuFlare Technology, Inc.
Shigehiro HARA
G01 - MEASURING TESTING
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
Publication number
20130256519
Publication date
Oct 3, 2013
NuFlare Technology, Inc.
Yasuo Kato
B82 - NANO-TECHNOLOGY