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Yasuo Kiyohara
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Kumamoto, JP
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last 30 patents
Information
Patent Grant
Substrate processing system and method for supplying processing fluid
Patent number
11,735,439
Issue date
Aug 22, 2023
Tokyo Electron Limited
Yasuo Kiyohara
B08 - CLEANING
Information
Patent Grant
Substrate processing system and method for supplying processing fluid
Patent number
11,482,427
Issue date
Oct 25, 2022
Tokyo Electron Limited
Yasuo Kiyohara
B08 - CLEANING
Information
Patent Grant
Supercritical fluid producing apparatus and substrate processing ap...
Patent number
10,796,897
Issue date
Oct 6, 2020
Tokyo Electron Limited
Yasuo Kiyohara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus
Patent number
10,593,571
Issue date
Mar 17, 2020
Tokyo Electron Limited
Hiroaki Inadomi
B08 - CLEANING
Information
Patent Grant
Substrate processing apparatus and liquid mixing method
Patent number
10,067,514
Issue date
Sep 4, 2018
Tokyo Electron Limited
Yasuo Kiyohara
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20230260807
Publication date
Aug 17, 2023
TOKYO ELECTRON LIMITED
Yasuo KIYOHARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM AND METHOD FOR SUPPLYING PROCESSING FLUID
Publication number
20230028053
Publication date
Jan 26, 2023
TOKYO ELECTRON LIMITED
Yasuo Kiyohara
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM AND METHOD FOR SUPPLYING PROCESSING FLUID
Publication number
20200098594
Publication date
Mar 26, 2020
TOKYO ELECTRON LIMITED
Yasuo Kiyohara
B08 - CLEANING
Information
Patent Application
SUPERCRITICAL FLUID PRODUCING APPARATUS AND SUBSTRATE PROCESSING AP...
Publication number
20180158676
Publication date
Jun 7, 2018
TOKYO ELECTRON LIMITED
Yasuo Kiyohara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...
Publication number
20180096863
Publication date
Apr 5, 2018
TOKYO ELECTRON LIMITED
Gentaro GOSHI
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20170287742
Publication date
Oct 5, 2017
TOKYO ELECTRON LIMITED
Hiroaki Inadomi
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND LIQUID MIXING METHOD
Publication number
20150146498
Publication date
May 28, 2015
TOKYO ELECTRON LIMITED
Yasuo Kiyohara
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL