Yasuo Manabe

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Kawasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of displaying, inspecting and modifying pattern for exposure
- Patent number 6,546,543
- Issue date Apr 8, 2003
- Fujitsu Limited
- Yasuo Manabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam exposure method and charged particle beam exp...
- Patent number 6,350,992
- Issue date Feb 26, 2002
- Fujitsu Limited
- Yasuo Manabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Charged particle beam exposure method utilizing subfield proximity...
- Patent number 6,087,052
- Issue date Jul 11, 2000
- Fujitsu Limited
- Yasuo Manabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Charged particle beam exposure method and charged particle beam exp...
- Patent number 6,060,717
- Issue date May 9, 2000
- Fujitsu Limited
- Yasuo Manabe
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Exposure data preparing apparatus, exposure data preparing method a...
- Patent number 5,955,738
- Issue date Sep 21, 1999
- Fujitsu Limited
- Yasuo Manabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure data processing method and device
- Patent number 5,754,443
- Issue date May 19, 1998
- Fujitsu Limited
- Yasuo Manabe
- H01 - BASIC ELECTRIC ELEMENTS