Yasuo NAKATANI

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Nirasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for processing oxygen-containing workpiece
- Patent number 11,548,804
- Issue date Jan 10, 2023
- Tokyo Electron Limited
- Reiko Sasahara
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
HEATING/COOLING DEVICE AND HEATING/COOLING METHOD
- Publication number 20220336238
- Publication date Oct 20, 2022
- Tokyo Electron Limited
- Shosuke ENDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING OXYGEN-CONTAINING WORKPIECE
- Publication number 20200048134
- Publication date Feb 13, 2020
- TOKYO ELECTRON LIMITED
- Reiko SASAHARA
- C03 - GLASS MINERAL OR SLAG WOOL