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Kudamatsu, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
10,559,481
Issue date
Feb 11, 2020
Hitachi High-Technologies Corporation
Michikazu Morimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
10,522,331
Issue date
Dec 31, 2019
Hitachi High-Technologies Corporation
Yasuo Ohgoshi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
10,192,718
Issue date
Jan 29, 2019
Hitachi High-Technologies Corporation
Michikazu Morimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for plasma processing
Patent number
10,121,640
Issue date
Nov 6, 2018
Hitachi High-Technologies Corporation
Satoru Muto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
9,514,967
Issue date
Dec 6, 2016
Hitachi High-Technologies Corporation
Yasuo Ohgoshi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
9,502,217
Issue date
Nov 22, 2016
Hitachi High-Technologies Corporation
Shunsuke Kanazawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
9,336,999
Issue date
May 10, 2016
Hitachi High-Technologies Corporation
Michikazu Morimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
9,305,803
Issue date
Apr 5, 2016
Hitachi High-Technologies Corporation
Michikazu Morimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
8,992,724
Issue date
Mar 31, 2015
Hitachi High-Technologies Corporation
Shunsuke Kanazawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for plasma processing
Patent number
8,969,211
Issue date
Mar 3, 2015
Hitachi High-Technologies Corporation
Satoru Muto
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20180337022
Publication date
Nov 22, 2018
Hitachi High-Technologies Corporation
Michikazu Morimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20170040143
Publication date
Feb 9, 2017
Hitachi High-Technologies Corporation
Yasuo OHGOSHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20170025289
Publication date
Jan 26, 2017
Hitachi High-Technologies Corporation
Michikazu Morimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20160233057
Publication date
Aug 11, 2016
Hitachi High-Technologies Corporation
Michikazu Morimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20160181131
Publication date
Jun 23, 2016
Hitachi High-Technologies Corporation
Michikazu Morimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR PLASMA PROCESSING
Publication number
20150170880
Publication date
Jun 18, 2015
Hitachi High-Technologies Corporation
Satoru MUTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20150170886
Publication date
Jun 18, 2015
Hitachi High-Technologies Corporation
Michikazu MORIMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma Processing Apparatus and Plasma Processing Method
Publication number
20150144594
Publication date
May 28, 2015
Hitachi High-Technologies Corporation
Shunsuke Kanazawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20140363977
Publication date
Dec 11, 2014
Hitachi High-Technologies Corporation
Michikazu Morimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR PLASMA PROCESSING
Publication number
20140302682
Publication date
Oct 9, 2014
Hitachi High-Technologies Corporation
Satoru MUTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20140148016
Publication date
May 29, 2014
Hitachi High-Technologies Corporation
Shunsuke Kanazawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20140057445
Publication date
Feb 27, 2014
Hitachi High-Technologies Corporation
Michikazu MORIMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20140020831
Publication date
Jan 23, 2014
Hitachi High-Technologies Corporation
Yasuo OHGOSHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20120252219
Publication date
Oct 4, 2012
Hitachi High-Technologies Corporation
Michikazu MORIMOTO
H01 - BASIC ELECTRIC ELEMENTS