Yasushi Fujii

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,732,357
- Issue date Aug 22, 2023
- Tokyo Electron Limited
- Tsuyoshi Takahashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,551,933
- Issue date Jan 10, 2023
- Tokyo Electron Limited
- Mitsuhiro Okada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas processing apparatus and gas processing method
- Patent number 11,499,225
- Issue date Nov 15, 2022
- Tokyo Electron Limited
- Hirotaka Kuwada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film-forming apparatus and film-forming method
- Patent number 11,248,293
- Issue date Feb 15, 2022
- Tokyo Electron Limited
- Hirotaka Kuwada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 10,864,548
- Issue date Dec 15, 2020
- Tokyo Electron Limited
- Hiroaki Ashizawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate mounting method and substrate mounting device
- Patent number 10,340,176
- Issue date Jul 2, 2019
- Tokyo Electron Limited
- Toshiaki Fujisato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid processing method, substrate liquid processing app...
- Patent number 10,333,062
- Issue date Jun 25, 2019
- Tokyo Electron Limited
- Yasushi Fujii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing method, liquid processing apparatus and storage m...
- Patent number 9,111,967
- Issue date Aug 18, 2015
- Tokyo Electron Limited
- Kenji Sekiguchi
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Substrate liquid processing apparatus, substrate liquid processing...
- Patent number 8,475,668
- Issue date Jul 2, 2013
- Tokyo Electron Limited
- Hiroshi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device manufacturing method that recovers damage of t...
- Patent number 7,902,077
- Issue date Mar 8, 2011
- Tokyo Electron Limited
- Ryuichi Asako
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method
- Patent number 7,482,281
- Issue date Jan 27, 2009
- Tokyo Electron Limited
- Yasushi Fujii
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR FORMING CARBON-CONTAINING FILM, AND METHOD FOR FORMING H...
- Publication number 20240392432
- Publication date Nov 28, 2024
- TOKYO ELECTRON LIMITED
- Miyako KANEKO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200392622
- Publication date Dec 17, 2020
- TOKYO ELECTRON LIMITED
- Tsuyoshi TAKAHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200258748
- Publication date Aug 13, 2020
- TOKYO ELECTRON LIMITED
- Mitsuhiro OKADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS PROCESSING APPARATUS AND GAS PROCESSING METHOD
- Publication number 20200048765
- Publication date Feb 13, 2020
- TOKYO ELECTRON LIMITED
- Hirotaka KUWADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film Forming Apparatus and Film Forming Method
- Publication number 20200048764
- Publication date Feb 13, 2020
- TOKYO ELECTRON LIMITED
- Hirotaka KUWADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20180311700
- Publication date Nov 1, 2018
- TOKYO ELECTRON LIMITED
- Hiroaki Ashizawa
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE LIQUID PROCESSING METHOD, SUBSTRATE LIQUID PROCESSING APP...
- Publication number 20180301623
- Publication date Oct 18, 2018
- Yasushi Fujii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE MOUNTING METHOD AND SUBSTRATE MOUNTING DEVICE
- Publication number 20180040503
- Publication date Feb 8, 2018
- TOKYO ELECTRON LIMITED
- Toshiaki FUJISATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING METHOD, LIQUID PROCESSING APPARATUS AND STORAGE M...
- Publication number 20120260949
- Publication date Oct 18, 2012
- Kenji SEKIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING METHOD, LIQUID PROCESSING APPARATUS AND STORAGE M...
- Publication number 20120125368
- Publication date May 24, 2012
- TOKYO ELECTRON LIMITED
- Miyako KANEKO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SUBSTRATE PROCESSING...
- Publication number 20110120650
- Publication date May 26, 2011
- TOKYO ELECTRON LIMITED
- Ryuichi ASAKO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...
- Publication number 20110089137
- Publication date Apr 21, 2011
- TOKYO ELECTRON LIMITED
- Hiroshi TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Method and Storage Medium
- Publication number 20090286399
- Publication date Nov 19, 2009
- Yasushi Fujii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SUBSTRATE PROCESSING...
- Publication number 20070122752
- Publication date May 31, 2007
- TOKYO ELECTRON LIMITED
- Ryuichi ASAKO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing method
- Publication number 20070077768
- Publication date Apr 5, 2007
- TOKYO ELECTRON LIMITED
- Yasushi Fujii
- H01 - BASIC ELECTRIC ELEMENTS

Yasushi Fujii

Person

Patents Grantslast 30 patents

Substrate processing method and substrate processing apparatus

Substrate processing method and substrate processing apparatus

Gas processing apparatus and gas processing method

Film-forming apparatus and film-forming method

Film forming method and film forming apparatus

Substrate mounting method and substrate mounting device

Substrate liquid processing method, substrate liquid processing app...

Liquid processing method, liquid processing apparatus and storage m...

Substrate liquid processing apparatus, substrate liquid processing...

Semiconductor device manufacturing method that recovers damage of t...

Substrate processing method

Patents Applicationslast 30 patents

METHOD FOR FORMING CARBON-CONTAINING FILM, AND METHOD FOR FORMING H...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

GAS PROCESSING APPARATUS AND GAS PROCESSING METHOD

Film Forming Apparatus and Film Forming Method

FILM FORMING METHOD AND FILM FORMING APPARATUS

SUBSTRATE LIQUID PROCESSING METHOD, SUBSTRATE LIQUID PROCESSING APP...

SUBSTRATE MOUNTING METHOD AND SUBSTRATE MOUNTING DEVICE

LIQUID PROCESSING METHOD, LIQUID PROCESSING APPARATUS AND STORAGE M...

LIQUID PROCESSING METHOD, LIQUID PROCESSING APPARATUS AND STORAGE M...

SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SUBSTRATE PROCESSING...

SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...

Substrate Processing Method and Storage Medium

SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SUBSTRATE PROCESSING...

Substrate processing method