Yasushi Gotoh

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Kokubunji, JP

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Patents Grantslast 30 patents

Information Patent Grant
Grooved gate transistor having source and drain diffused layers wit...
- Patent number 5,408,116
- Issue date Apr 18, 1995
- Hitachi, Ltd.
- Junko Tanaka
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Etching method and etching apparatus therefor
- Patent number 5,352,324
- Issue date Oct 4, 1994
- Hitachi, Ltd.
- Yasushi Gotoh
- H01 - BASIC ELECTRIC ELEMENTS