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Yasushi Hayashida
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus and method of application and development
Patent number
8,863,373
Issue date
Oct 21, 2014
Tokyo Electron Limited
Nobuaki Matsuoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Coating/developing device and method
Patent number
8,408,158
Issue date
Apr 2, 2013
Tokyo Electron Limited
Masami Akimoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Coating and developing system control method of controlling coating...
Patent number
8,377,501
Issue date
Feb 19, 2013
Tokyo Electron Limited
Yasushi Hayashida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Coating and developing apparatus, substrate processing method, and...
Patent number
8,313,257
Issue date
Nov 20, 2012
Tokyo Electron Limited
Nobuaki Matsuoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Coating and developing apparatus
Patent number
8,302,556
Issue date
Nov 6, 2012
Tokyo Electron Limited
Masami Akimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing system
Patent number
8,206,076
Issue date
Jun 26, 2012
Tokyo Electron Limited
Issei Ueda
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Wet-processing apparatus, wet-processing method and storage medium
Patent number
8,057,114
Issue date
Nov 15, 2011
Tokyo Electron Limited
Yasushi Hayashida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Coating and developing system, coating and developing method and st...
Patent number
8,025,023
Issue date
Sep 27, 2011
Tokyo Electron Limited
Yasushi Hayashida
G05 - CONTROLLING REGULATING
Information
Patent Grant
Coating and developing system with a direct carrying device in a pr...
Patent number
7,997,813
Issue date
Aug 16, 2011
Tokyo Electron Limited
Nobuaki Matsuoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Coating and developing apparatus, substrate processing method, and...
Patent number
7,955,011
Issue date
Jun 7, 2011
Tokyo Electron Limited
Nobuaki Matsuoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing system and substrate processing method
Patent number
7,880,859
Issue date
Feb 1, 2011
Tokyo Electron Limited
Yasushi Hayashida
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Coating and developing system, coating and developing method and st...
Patent number
7,871,211
Issue date
Jan 18, 2011
Tokyo Electron Limited
Nobuaki Matsuoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method of application and development
Patent number
7,841,072
Issue date
Nov 30, 2010
Tokyo Electron Limited
Nobuaki Matsuoka
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Coating and developing apparatus
Patent number
7,793,609
Issue date
Sep 14, 2010
Tokyo Electron Limited
Masami Akimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Coating and developing system, coating and developing method and st...
Patent number
7,789,577
Issue date
Sep 7, 2010
Tokyo Electron Limited
Nobuaki Matsuoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing system, and method of control therefor, contro...
Patent number
7,729,798
Issue date
Jun 1, 2010
Tokyo Electron Limited
Yasushi Hayashida
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Coating method and coating apparatus
Patent number
7,678,417
Issue date
Mar 16, 2010
Tokyo Electron Limited
Yoshitaka Hara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing system and substrate processing method
Patent number
7,645,713
Issue date
Jan 12, 2010
Tokyo Electron Limited
Yasushi Hayashida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Coating and developing system, coating and developing method and st...
Patent number
7,597,492
Issue date
Oct 6, 2009
Tokyo Electron Limited
Yasushi Hayashida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Coater/developer, coating/developing method, and storage medium
Patent number
7,591,601
Issue date
Sep 22, 2009
Tokyo Electron Limited
Nobuaki Matsuoka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Coating and developing system
Patent number
7,474,377
Issue date
Jan 6, 2009
Tokyo Electron Limited
Nobuaki Matsuoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Coating and developing system
Patent number
7,403,260
Issue date
Jul 22, 2008
Tokyo Electron Limited
Nobuaki Matsuoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Coating and developing apparatus and coating and developing method
Patent number
7,322,756
Issue date
Jan 29, 2008
Tokyo Electron Limited
Masami Akimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Coating and developing system and coating and developing method
Patent number
7,281,869
Issue date
Oct 16, 2007
Tokyo Electron Limited
Masami Akimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Coating and developing system and coating and developing method
Patent number
7,267,497
Issue date
Sep 11, 2007
Tokyo Electron Limited
Masami Akimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Coating and developing apparatus and coating and developing method
Patent number
7,262,829
Issue date
Aug 28, 2007
Tokyo Electron Limited
Yasushi Hayashida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Coating and developing system and coating and developing method wit...
Patent number
7,245,348
Issue date
Jul 17, 2007
Tokyo Electron Limited
Masami Akimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Coating and developing system and coating and developing method
Patent number
7,241,061
Issue date
Jul 10, 2007
Tokyo Electron Limited
Masami Akimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Steering gear apparatus of rack-and-pinion type
Patent number
5,724,857
Issue date
Mar 10, 1998
Toyota Jidosha Kabushiki Kaisha
Yoshisada Wada
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Grant
Steering gear apparatus of rack-and-pinion type
Patent number
5,596,904
Issue date
Jan 28, 1997
Toyota Jidosha Kabushiki Kaisha
Yoshisada Wada
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Patents Applications
last 30 patents
Information
Patent Application
COATING AND DEVELOPING APPARATUS, SUBSTRATE PROCESSING METHOD, AND...
Publication number
20110211825
Publication date
Sep 1, 2011
TOKYO ELECTRON LIMITED
Nobuaki Matsuoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD OF APPLICATION AND DEVELOPMENT
Publication number
20110032494
Publication date
Feb 10, 2011
TOKYO ELECTRON LIMITED
Nobuaki Matsuoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COATING AND DEVELOPING APPARATUS
Publication number
20100326353
Publication date
Dec 30, 2010
TOKYO ELECTRON LIMITED
Masami Akimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COATING AND DEVELOPING APPARATUS
Publication number
20100300353
Publication date
Dec 2, 2010
TOKYO ELECTRON LIMITED
Masami Akimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
Publication number
20100063623
Publication date
Mar 11, 2010
TOKYO ELECTRON LIMITED
Yasushi Hayashida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COATING AND DEVELOPING SYSTEM CONTROL METHOD OF CONTROLLING COATING...
Publication number
20100021621
Publication date
Jan 28, 2010
Tokyo Electron Limited
Yasushi Hayashida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HYPOID GEAR DEVICE AND FINAL REDUCTION GEAR FOR VEHICLE
Publication number
20090084211
Publication date
Apr 2, 2009
KABUSHIKI KAISHA TOYOTA CHUO KENKYUSHO
Takayuki Aoyama
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM
Publication number
20090003825
Publication date
Jan 1, 2009
TOKYO ELECTRON LIMITED
Issei Ueda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COATING AND DEVELOPING SYSTEM, COATING AND DEVELOPING METHOD AND ST...
Publication number
20080268383
Publication date
Oct 30, 2008
TOKYO ELECTRON LIMITED
Nobuaki MATSUOKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COATER/DEVELOPER, COATING/DEVELOPING METHOD, AND STORAGE MEDIUM
Publication number
20080266532
Publication date
Oct 30, 2008
TOKYO ELECTRON LIMITED
Nobuaki MATSUOKA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
COATING AND DEVELOPING SYSTEM, COATING AND DEVELOPING METHOD AND ST...
Publication number
20080241403
Publication date
Oct 2, 2008
TOKYO ELECTRON LIMITED
Nobuaki MATSUOKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COATING AND DEVELOPING SYSTEM, COATING AND DEVELOPING METHOD AND ST...
Publication number
20080241402
Publication date
Oct 2, 2008
TOKYO ELECTRON LIMITED
Nobuaki MATSUOKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Coating and developing system, coating and developing method and st...
Publication number
20080129968
Publication date
Jun 5, 2008
TOKYO ELECTRON LIMITED
Yasushi Hayashida
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Wet-processing apparatus, wet-processing method and storage medium
Publication number
20080070164
Publication date
Mar 20, 2008
TOKYO ELECTRON LIMITED
Yasushi Hayashida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Coating and developing system, coating and developing method and st...
Publication number
20080026153
Publication date
Jan 31, 2008
TOKYO ELECTRON LIMITED
Yasushi Hayashida
G05 - CONTROLLING REGULATING
Information
Patent Application
COATING AND DEVELOPING APPARATUS, SUBSTRATE PROCESSING METHOD, AND...
Publication number
20080014333
Publication date
Jan 17, 2008
TOKYO ELECTRON LIMITED
Nobuaki Matsuoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Coating and developing apparatus
Publication number
20070056514
Publication date
Mar 15, 2007
TOKYO ELECTRON LIMITED
Masami Akimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate processing system and substrate processing method
Publication number
20060276046
Publication date
Dec 7, 2006
TOKYO ELECTON LIMITED
Yasushi Hayashida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Coating method and coating apparatus
Publication number
20060251817
Publication date
Nov 9, 2006
TOKYO ELECTRON LIMITED
Yoshitaka Hara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrated processing system, and method of control therefor, contr...
Publication number
20060228195
Publication date
Oct 12, 2006
Yasushi Hayashida
G05 - CONTROLLING REGULATING
Information
Patent Application
Apparatus and method of application and development
Publication number
20060213052
Publication date
Sep 28, 2006
TOKYO ELECTRON LIMITED
Nobuaki Matsuoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Coating and developing system
Publication number
20060201615
Publication date
Sep 14, 2006
TOKYO ELECTRON LIMITED
Nobuaki Matsuoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Coating and developing system
Publication number
20060201616
Publication date
Sep 14, 2006
TOKYO ELECTRON LIMITED
Nobuaki Matsuoka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
COATING/DEVELOPING DEVICE AND METHOD
Publication number
20060201423
Publication date
Sep 14, 2006
TOKYO ELECTRON LIMITED
Masami Akimoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Coating and developing apparatus and coating and developing method
Publication number
20060183340
Publication date
Aug 17, 2006
TOKYO ELECTRON LIMITED
Yasushi Hayashida
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Coating and developing apparatus and coating and developing method
Publication number
20060165408
Publication date
Jul 27, 2006
TOKYO ELECTRON LIMITED
Masami Akimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Coating and developing system and coating and developing method
Publication number
20060165409
Publication date
Jul 27, 2006
TOKYO ELECTRON LIMITED
Masami Akimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Coating and developing system and coating and developing method
Publication number
20060164613
Publication date
Jul 27, 2006
TOKYO ELECTRON LIMITED
Masami Akimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Coating and developing system and coating and developing method
Publication number
20060162646
Publication date
Jul 27, 2006
TOKYO ELECTRON LIMITED
Masami Akimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Coating and developing system and coating and developing method
Publication number
20060162858
Publication date
Jul 27, 2006
TOKYO ELECTRON LIMITED
Masami Akimoto
H01 - BASIC ELECTRIC ELEMENTS