TREA

Yasushi Inata

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  • Nirasaki-shi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma etching method
    • Patent number 7,300,881
    • Issue date Nov 27, 2007
    • Tokyo Electron Limited
    • Kazuya Kato
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    Plasma etching method
    • Publication number 20050101137
    • Publication date May 12, 2005
    • TOKYO ELECTRON LIMITED
    • Kazuya Kato
    • H01 - BASIC ELECTRIC ELEMENTS