Yasushi Kamiya

Person

Kawasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for processing substrate using ion beam
- Patent number 10,062,545
- Issue date Aug 28, 2018
- Canon Anelva Corporation
- Yasushi Kamiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam etching method and ion beam etching apparatus
- Patent number 9,966,092
- Issue date May 8, 2018
- Canon Anelva Corporation
- Yasushi Kamiya
- G11 - INFORMATION STORAGE
Information Patent Grant
Ion beam processing method and ion beam processing apparatus
- Patent number 9,852,879
- Issue date Dec 26, 2017
- Canon Anelva Corporation
- Yasushi Kamiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and method of manufacturing semiconduct...
- Patent number 9,564,360
- Issue date Feb 7, 2017
- Canon Anelva Corporation
- Hiroshi Akasaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion beam generator and ion beam plasma processing apparatus
- Patent number 9,422,623
- Issue date Aug 23, 2016
- Canon Anelva Corporation
- Einstein Noel Abarra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for processing substrate using ion beam
- Patent number 9,312,102
- Issue date Apr 12, 2016
- Canon Anelva Corporation
- Yasushi Kamiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating fin FET and method of fabricating device
- Patent number 9,190,287
- Issue date Nov 17, 2015
- Canon Anelva Corporation
- Takashi Nakagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam generator
- Patent number 8,378,576
- Issue date Feb 19, 2013
- Canon Anelva Corporation
- Einstein Noel Abarra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon nitride film forming method
- Patent number 7,704,556
- Issue date Apr 27, 2010
- Canon Anelva Corporation
- Hitoshi Morisaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ION BEAM ETCHING METHOD AND ION BEAM ETCHING APPARATUS
- Publication number 20170098458
- Publication date Apr 6, 2017
- Canon ANELVA Corporation
- Yasushi Kamiya
- G11 - INFORMATION STORAGE
Information Patent Application
SUBSTRATE PROCESSING METHOD AND METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20160268162
- Publication date Sep 15, 2016
- Canon ANELVA Corporation
- Hiroshi Akasaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR PROCESSING SUBSTRATE USING ION BEAM
- Publication number 20160189925
- Publication date Jun 30, 2016
- Canon ANELVA Corporation
- Yasushi KAMIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM PROCESSING METHOD AND ION BEAM PROCESSING APPARATUS
- Publication number 20150303028
- Publication date Oct 22, 2015
- Canon ANELVA Corporation
- Yasushi Kamiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FABRICATING FIN FET AND METHOD OF FABRICATING DEVICE
- Publication number 20140206197
- Publication date Jul 24, 2014
- Canon ANELVA Corporation
- Takashi NAKAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM GENERATOR AND ION BEAM PLASMA PROCESSING APPARATUS
- Publication number 20140124363
- Publication date May 8, 2014
- Canon ANELVA Corporation
- Einstein Noel ABARRA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR PROCESSING SUBSTRATE USING ION BEAM
- Publication number 20120145535
- Publication date Jun 14, 2012
- Canon ANELVA Corporation
- Yasushi KAMIYA
- G05 - CONTROLLING REGULATING
Information Patent Application
ION BEAM GENERATOR
- Publication number 20110139998
- Publication date Jun 16, 2011
- Canon ANELVA Corporation
- Einstein Noel ABARRA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Silicon Nitride Film Forming Method
- Publication number 20080020140
- Publication date Jan 24, 2008
- Hitoshi Morisaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Silicon nitride film forming apparatus and film forming method
- Publication number 20030198743
- Publication date Oct 23, 2003
- Hitoshi Morisaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Yasushi Kamiya

Person

Patents Grantslast 30 patents

Apparatus and method for processing substrate using ion beam

Ion beam etching method and ion beam etching apparatus

Ion beam processing method and ion beam processing apparatus

Substrate processing method and method of manufacturing semiconduct...

Ion beam generator and ion beam plasma processing apparatus

Apparatus and method for processing substrate using ion beam

Method of fabricating fin FET and method of fabricating device

Ion beam generator

Silicon nitride film forming method

Patents Applicationslast 30 patents

ION BEAM ETCHING METHOD AND ION BEAM ETCHING APPARATUS

SUBSTRATE PROCESSING METHOD AND METHOD OF MANUFACTURING SEMICONDUCT...

APPARATUS AND METHOD FOR PROCESSING SUBSTRATE USING ION BEAM

ION BEAM PROCESSING METHOD AND ION BEAM PROCESSING APPARATUS

METHOD OF FABRICATING FIN FET AND METHOD OF FABRICATING DEVICE

ION BEAM GENERATOR AND ION BEAM PLASMA PROCESSING APPARATUS

APPARATUS AND METHOD FOR PROCESSING SUBSTRATE USING ION BEAM

ION BEAM GENERATOR

Silicon Nitride Film Forming Method

Silicon nitride film forming apparatus and film forming method