Yasushi Kato

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Kanagawa, JP

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Patents Grantslast 30 patents

Information Patent Grant
Manufacturing apparatus and manufacturing method for semiconductor...
- Patent number 6,777,355
- Issue date Aug 17, 2004
- Sony Corporation
- Toshiro Kisakibaru
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing apparatus and manufacturing method for semiconductor...
- Patent number 6,670,290
- Issue date Dec 30, 2003
- Toshiro Kisakibaru
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for plasma control
- Patent number 6,255,220
- Issue date Jul 3, 2001
- Sony Corporation
- Toshiro Kisakibaru
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for plasma control
- Patent number 5,945,008
- Issue date Aug 31, 1999
- Sony Corporation
- Toshiro Kisakibaru
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for plasma treatment
- Patent number 5,431,769
- Issue date Jul 11, 1995
- Sony Corporation
- Toshiro Kisakibaru
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MANUFACTURING APPARATUS AND MANUFACTURING METHOD FOR SEMICONDUCTOR...
- Publication number 20040102058
- Publication date May 27, 2004
- Toshiro Kisakibaru
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Manufacturing apparatus and manufacturing method for semiconductor...
- Publication number 20020090283
- Publication date Jul 11, 2002
- Toshiro Kisakibaru
- H01 - BASIC ELECTRIC ELEMENTS