Yasushi Kodashima

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Fabrication process flow of dielectric layer for isolation of nano-...
- Patent number 11,605,712
- Issue date Mar 14, 2023
- Tokyo Electron Limited
- Shimpei Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus, transferring apparatus and transferring method
- Patent number 6,852,194
- Issue date Feb 8, 2005
- Tokyo Electron Limited
- Minoru Matsushita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PVD APPARATUS
- Publication number 20230051865
- Publication date Feb 16, 2023
- TOKYO ELECTRON LIMITED
- Takuya SEINO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FABRICATION PROCESS FLOW OF DIELECTRIC LAYER FOR ISOLATION OF NANO-...
- Publication number 20210375684
- Publication date Dec 2, 2021
- TOKYO ELECTRON LIMITED
- Shimpei YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING SYSTEM
- Publication number 20070107845
- Publication date May 17, 2007
- Shigeru Ishizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Processing apparatus, transferring apparatus, and transferring method
- Publication number 20040261710
- Publication date Dec 30, 2004
- TOKYO ELECTRON LIMITED
- Minoru Matsushita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor processing system
- Publication number 20040238122
- Publication date Dec 2, 2004
- Shigeru Ishizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Processing apparatus, transferring apparatus and transferring method
- Publication number 20020170671
- Publication date Nov 21, 2002
- Minoru Matsushita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Processing system
- Publication number 20020044860
- Publication date Apr 18, 2002
- Yoshinobu Hayashi
- H01 - BASIC ELECTRIC ELEMENTS

Yasushi Kodashima

Person

Patents Grantslast 30 patents

Fabrication process flow of dielectric layer for isolation of nano-...

Processing apparatus, transferring apparatus and transferring method

Patents Applicationslast 30 patents

PVD APPARATUS

FABRICATION PROCESS FLOW OF DIELECTRIC LAYER FOR ISOLATION OF NANO-...

SEMICONDUCTOR PROCESSING SYSTEM

Processing apparatus, transferring apparatus, and transferring method

Semiconductor processing system

Processing apparatus, transferring apparatus and transferring method

Processing system