Yasushi Kojima

Person

Tokyo, JP

People

Patents Applicationslast 30 patents

Information Patent Application
Substrate cleaning apparatus
- Publication number 20090101181
- Publication date Apr 23, 2009
- EBARA CORPORATION
- Shinya Morisawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD
- Publication number 20080220621
- Publication date Sep 11, 2008
- TOKYO ELECTRON LIMITED
- Hiroyuki Shinozaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20070095791
- Publication date May 3, 2007
- e-Beam Corporation
- Hiroyuki SHINOZAKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20070092646
- Publication date Apr 26, 2007
- e-Beam Corporation
- Hiroyuki SHINOZAKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20070092651
- Publication date Apr 26, 2007
- e-Beam Corporation
- Hiroyuki SHINOZAKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20060169208
- Publication date Aug 3, 2006
- e-BEAM Corporation
- Hiroyuki Shinozaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Yasushi Kojima

Person

Patents Applicationslast 30 patents

Substrate cleaning apparatus

SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Substrate processing apparatus and substrate processing method