Yasushi MASUDA

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Supporting member and substrate processing apparatus
- Patent number 10,553,408
- Issue date Feb 4, 2020
- Tokyo Electron Limited
- Akihiro Yoshimura
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20150228462
- Publication date Aug 13, 2015
- TOKYO ELECTRON LIMITED
- Akihiro Yoshimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPPORTING MEMBER AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20150013938
- Publication date Jan 15, 2015
- TOKYO ELECTRON LIMITED
- Akihiro YOSHIMURA
- F28 - HEAT EXCHANGE IN GENERAL