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Yasushi Mizusawa
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Susono, JP
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last 30 patents
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Patent Grant
Method of forming interconnect film
Patent number
6,451,682
Issue date
Sep 17, 2002
Ulvac, Inc.
Takao Fujikawa
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method of forming metal wiring film
Patent number
6,299,739
Issue date
Oct 9, 2001
Kabushiki Kaisha Kobe Seiko Sho
Takao Fujikawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...