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Yasushi Mizusawa
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Annaka, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Evaluation method of silicon epitaxial wafer
Patent number
11,205,599
Issue date
Dec 21, 2021
Shin-Etsu Handotai Co., Ltd.
Yasushi Mizusawa
B07 - SEPARATING SOLIDS FROM SOLIDS SORTING
Information
Patent Grant
Method for manufacturing silicon epitaxial wafer and method for man...
Patent number
10,734,220
Issue date
Aug 4, 2020
Shin-Etsu Handotai Co., Ltd.
Yasushi Mizusawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Manufacturing method and evaluation method of silicon epitaxial wafer
Patent number
10,643,908
Issue date
May 5, 2020
Shin-Etsu Handotai Co., Ltd.
Yasushi Mizusawa
B07 - SEPARATING SOLIDS FROM SOLIDS SORTING
Information
Patent Grant
Method for calculating warpage of bonded SOI wafer and method for m...
Patent number
8,962,352
Issue date
Feb 24, 2015
Shin-Etsu Handotai Co., Ltd.
Isao Yokokawa
G01 - MEASURING TESTING
Information
Patent Grant
Method for forming oxide film on silicon wafer
Patent number
8,043,871
Issue date
Oct 25, 2011
Shin-Etsu Handotai Co., Ltd.
Tsuyoshi Ohtsuki
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
EVALUATION METHOD OF SILICON EPITAXIAL WAFER
Publication number
20200161197
Publication date
May 21, 2020
Shin-Etsu Handotai Co., Ltd.
Yasushi MIZUSAWA
B07 - SEPARATING SOLIDS FROM SOLIDS SORTING
Information
Patent Application
METHOD FOR MANUFACTURING SILICON EPITAXIAL WAFER AND METHOD FOR MAN...
Publication number
20190228962
Publication date
Jul 25, 2019
Shin-Etsu Handotai Co., Ltd.
Yasushi MIZUSAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MANUFACTURING METHOD AND EVALUATION METHOD OF SILICON EPITAXIAL WAFER
Publication number
20180277450
Publication date
Sep 27, 2018
Shin-Etsu Handotai Co., Ltd.
Yasushi MIZUSAWA
C30 - CRYSTAL GROWTH
Information
Patent Application
METHOD FOR CALCULATING WARPAGE OF BONDED SOI WAFER AND METHOD FOR M...
Publication number
20140186977
Publication date
Jul 3, 2014
Shin-Etsu Handotai Co., Ltd.
Isao Yokokawa
G01 - MEASURING TESTING
Information
Patent Application
METHOD FOR FORMING OXIDE FILM ON SILICON WAFER
Publication number
20110033958
Publication date
Feb 10, 2011
Shin-Etsu Handotai Co., Ltd.
Tsuyoshi Ohtsuki
H01 - BASIC ELECTRIC ELEMENTS