Yasushi Morita

Follow

Person

Nirasaki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Film forming apparatus
- Patent number 12,027,344
- Issue date Jul 2, 2024
- Tokyo Electron Limited
- Shinya Iwashita
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA TREATMENT APPARATUS AND PLASMA TREATMENT METHOD
- Publication number 20230307215
- Publication date Sep 28, 2023
- TOKYO ELECTRON LIMITED
- Tatsuo MATSUDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS
- Publication number 20230051432
- Publication date Feb 16, 2023
- TOKYO ELECTRON LIMITED
- Shinya IWASHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20220020568
- Publication date Jan 20, 2022
- TOKYO ELECTRON LIMITED
- Takahiro SHINDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING APPARATUS
- Publication number 20190385815
- Publication date Dec 19, 2019
- TOKYO ELECTRON LIMITED
- Shinya IWASHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SOURCE SUPPLYING APPARATUS AND FILM FORMING APPARATUS
- Publication number 20120192794
- Publication date Aug 2, 2012
- TOKYO ELECTRON LIMITED
- Hidetoshi Kinoshita
- C30 - CRYSTAL GROWTH