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Yasushi Nagashima
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Nara, JP
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last 30 patents
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Patent Grant
Substrate stage and heat treatment apparatus
Patent number
7,764,355
Issue date
Jul 27, 2010
Tohoku University
Tadahiro Ohmi
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
SUBSTRATE STAGE AND HEAT TREATMENT APPARATUS
Publication number
20080024742
Publication date
Jan 31, 2008
Tadahiro Ohmi
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR