Yasushi Ohyama

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Kodaira, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of producing a contact plug
- Patent number 4,906,593
- Issue date Mar 6, 1990
- Fujitsu Limited
- Yoshimi Shioya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for plasma chemical vapor deposition
- Patent number 4,625,678
- Issue date Dec 2, 1986
- Fujitsu Limited
- Yoshimi Shioya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...