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Yasushi SONODA
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Ion shield plate for plasma processing apparatus
Patent number
D1008986
Issue date
Dec 26, 2023
HITACHI HIGH-TECH CORPORATION
Yusuke Nakatani
D13 - Equipment for production, distribution, or transformation of energy
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
11,776,792
Issue date
Oct 3, 2023
HITACHI HIGH-TECH CORPORATION
Shunsuke Tashiro
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
11,387,110
Issue date
Jul 12, 2022
HITACHI HIGH-TECH CORPORATION
Yasushi Sonoda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
11,355,319
Issue date
Jun 7, 2022
HITACHI HIGH-TECH CORPORATION
Luke Joseph Himbele
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
11,232,932
Issue date
Jan 25, 2022
HITACHI HIGH-TECH CORPORATION
Masatoshi Kawakami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
10,699,909
Issue date
Jun 30, 2020
HITACH HIGH-TECH CORPORATION
Yasushi Sonoda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum processing apparatus
Patent number
10,522,333
Issue date
Dec 31, 2019
Hitachi High-Technologies Corporation
Yusaku Sakka
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PLASMA PROCESSING DEVICE AND PLASMA PROCESSING METHOD
Publication number
20240194450
Publication date
Jun 13, 2024
Hitachi High-Tech Corporation
Yasushi Sonoda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS SUPPLY APPARATUS, VACUUM PROCESSING APPARATUS, AND GAS SUPPLY M...
Publication number
20240055278
Publication date
Feb 15, 2024
Hitachi High-Tech Corporation
Yoshifumi Ogawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20220319809
Publication date
Oct 6, 2022
Hitachi High-Tech Corporation
Taku Iwase
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20220115212
Publication date
Apr 14, 2022
Hitachi High-Tech Corporation
Shunsuke Tashiro
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND PLASMA PROCESSING...
Publication number
20210082766
Publication date
Mar 18, 2021
Hitachi High-Tech Corporation
Makoto Miura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20200402809
Publication date
Dec 24, 2020
Hitachi High-Technologies Corporation
Yasushi SONODA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20190189403
Publication date
Jun 20, 2019
Hitachi High-Technologies Corporation
Luke Joseph HIMBELE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20190164725
Publication date
May 30, 2019
Hitachi High-Technologies Corporation
Masatoshi KAWAKAMI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20190088453
Publication date
Mar 21, 2019
Hitachi High-Technologies Corporation
Yasushi SONODA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20180277402
Publication date
Sep 27, 2018
Hitachi High-Technologies Corporation
Masatoshi KAWAKAMI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
THE VACUUM PROCESSING APPARATUS
Publication number
20180151336
Publication date
May 31, 2018
Hitachi High-Technologies Corporation
Yusaku SAKKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20160133530
Publication date
May 12, 2016
Hitachi High-Technologies Corporation
Yasushi SONODA
H01 - BASIC ELECTRIC ELEMENTS