Yasushi Sugiyama

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Minami Kawachi-machi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Lamp device, exposure apparatus, and method of manufacturing article
- Patent number 11,521,845
- Issue date Dec 6, 2022
- Canon Kabushiki Kaisha
- Hideki Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 6,551,172
- Issue date Apr 22, 2003
- Canon Kabushiki Kaisha
- Masaru Nyui
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 6,142,855
- Issue date Nov 7, 2000
- Canon Kabushiki Kaisha
- Masaru Nyui
- B24 - GRINDING POLISHING
Information Patent Grant
Film thickness measuring method and apparatus
- Patent number 6,137,575
- Issue date Oct 24, 2000
- Canon Kabushiki Kaisha
- Yasushi Sugiyama
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
LAMP DEVICE, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20210082682
- Publication date Mar 18, 2021
- Canon Kabushiki Kaisha
- Hideki Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS