Yasushi Takiguchi

Person

Koshi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,887,869
- Issue date Jan 30, 2024
- Tokyo Electron Limited
- Nobuhiko Mouri
- B08 - CLEANING
Information Patent Grant
Substrate cleaning apparatus and substrate cleaning method
- Patent number 11,554,389
- Issue date Jan 17, 2023
- Tokyo Electron Limited
- Akihiro Kubo
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 11,532,487
- Issue date Dec 20, 2022
- Tokyo Electron Limited
- Akihiro Kubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,139,182
- Issue date Oct 5, 2021
- Tokyo Electron Limited
- Nobuhiko Mouri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dressing apparatus and dressing method for substrate rear surface p...
- Patent number 11,059,145
- Issue date Jul 13, 2021
- Tokyo Electron Limited
- Yoshiki Okamoto
- B24 - GRINDING POLISHING
Information Patent Grant
Liquid processing apparatus
- Patent number 11,031,261
- Issue date Jun 8, 2021
- Tokyo Electron Limited
- Yasushi Takiguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method and sto...
- Patent number 10,840,079
- Issue date Nov 17, 2020
- Tokyo Electron Limited
- Yasushi Takiguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid processing apparatus
- Patent number 10,649,334
- Issue date May 12, 2020
- Tokyo Electron Limited
- Koki Yoshimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing apparatus, developing method and storage medium
- Patent number 10,289,004
- Issue date May 14, 2019
- Tokyo Electron Limited
- Kousuke Yoshihara
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Liquid processing method and storage medium
- Patent number 10,168,618
- Issue date Jan 1, 2019
- Tokyo Electron Limited
- Norihiko Sasagawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Developing method, developing apparatus and storage medium
- Patent number 10,120,285
- Issue date Nov 6, 2018
- Tokyo Electron Limited
- Kousuke Yoshihara
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Liquid processing apparatus
- Patent number 10,014,190
- Issue date Jul 3, 2018
- Tokyo Electron Limited
- Yasushi Takiguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning apparatus, substrate cleaning method, and storag...
- Patent number 9,947,556
- Issue date Apr 17, 2018
- Tokyo Electron Limited
- Yasushi Takiguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning method, substrate cleaning apparatus, and comput...
- Patent number 9,869,941
- Issue date Jan 16, 2018
- Tokyo Electron Limited
- Ryoichi Uemura
- B08 - CLEANING
Information Patent Grant
Substrate cleaning method
- Patent number 9,716,002
- Issue date Jul 25, 2017
- Tokyo Electron Limited
- Yasushi Takiguchi
- B08 - CLEANING
Information Patent Grant
Developing apparatus, developing method and storage medium
- Patent number 9,575,411
- Issue date Feb 21, 2017
- Tokyo Electron Limited
- Kousuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate cleaning method, substrate cleaning apparatus, and comput...
- Patent number 9,570,326
- Issue date Feb 14, 2017
- Tokyo Electron Limited
- Ryoichi Uemura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing method, developing apparatus and storage medium
- Patent number 9,568,829
- Issue date Feb 14, 2017
- Tokyo Electron Limited
- Kousuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing treatment apparatus and developing treatment method
- Patent number 9,470,979
- Issue date Oct 18, 2016
- Tokyo Electron Limited
- Yasushi Takiguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing treatment apparatus and developing treatment method
- Patent number 9,304,398
- Issue date Apr 5, 2016
- Tokyo Electron Limited
- Yasushi Takiguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid processing apparatus, liquid processing method and storage m...
- Patent number 9,195,138
- Issue date Nov 24, 2015
- Tokyo Electron Limited
- Norihiko Sasagawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid processing apparatus and liquid processing method
- Patent number 8,636,915
- Issue date Jan 28, 2014
- Tokyo Electron Limited
- Yasushi Takiguchi
- B08 - CLEANING
Information Patent Grant
Substrate cleaning apparatus, substrate cleaning method, and comput...
- Patent number 8,578,953
- Issue date Nov 12, 2013
- Tokyo Electron Limited
- Yasushi Takiguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Developing apparatus, developing method and storage medium
- Patent number 8,337,104
- Issue date Dec 25, 2012
- Tokyo Electron Limited
- Yasushi Takiguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing apparatus, developing method and storage medium
- Patent number 8,333,522
- Issue date Dec 18, 2012
- Tokyo Electron Limited
- Hiroshi Arima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating and developing apparatus, developing method and non-transit...
- Patent number 8,262,300
- Issue date Sep 11, 2012
- Tokyo Electron Limited
- Yasushi Takiguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating film forming apparatus and method
- Patent number 7,959,988
- Issue date Jun 14, 2011
- Tokyo Electron Limited
- Taro Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coater cup
- Patent number D610176
- Issue date Feb 16, 2010
- Tokyo Electron Limited
- Shuichi Nagamine
- D15 - Machines not elsewhere specified

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240213046
- Publication date Jun 27, 2024
- TOKYO ELECTRON LIMITED
- Nobuhiko Mouri
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
- Publication number 20230381825
- Publication date Nov 30, 2023
- TOKYO ELECTRON LIMITED
- Yoshiki Okamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20210398827
- Publication date Dec 23, 2021
- TOKYO ELECTRON LIMITED
- Nobuhiko Mouri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRESSING APPARATUS AND DRESSING METHOD FOR SUBSTRATE REAR SURFACE P...
- Publication number 20210308828
- Publication date Oct 7, 2021
- TOKYO ELECTRON LIMITED
- Yoshiki Okamoto
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
- Publication number 20210220878
- Publication date Jul 22, 2021
- TOKYO ELECTRON LIMITED
- Akihiro Kubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE WARPAGE CORRECTION METHOD, COMPUTER STORAGE MEDIUM, AND S...
- Publication number 20210039221
- Publication date Feb 11, 2021
- Tokyo Electron Limited
- Nozomu KANETAKE
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20200365417
- Publication date Nov 19, 2020
- TOKYO ELECTRON LIMITED
- Akihiro Kubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20190181022
- Publication date Jun 13, 2019
- TOKYO ELECTRON LIMITED
- Nobuhiko Mouri
- B08 - CLEANING
Information Patent Application
LIQUID PROCESSING APPARATUS
- Publication number 20190049845
- Publication date Feb 14, 2019
- TOKYO ELECTRON LIMITED
- Koki Yoshimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DRESSING APPARATUS AND DRESSING METHOD FOR SUBSTRATE REAR SURFACE P...
- Publication number 20190047118
- Publication date Feb 14, 2019
- TOKYO ELECTRON LIMITED
- Yoshiki Okamoto
- B24 - GRINDING POLISHING
Information Patent Application
Liquid Processing Apparatus
- Publication number 20180308719
- Publication date Oct 25, 2018
- TOKYO ELECTRON LIMITED
- Yasushi TAKIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus, Substrate Processing Method and Sto...
- Publication number 20180151343
- Publication date May 31, 2018
- TOKYO ELECTRON LIMITED
- Yasushi TAKIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING APPARATUS, AND COMPUT...
- Publication number 20170090305
- Publication date Mar 30, 2017
- TOKYO ELECTRON LIMITED
- Ryoichi UEMURA
- B08 - CLEANING
Information Patent Application
DEVELOPING METHOD, DEVELOPING APPARATUS AND STORAGE MEDIUM
- Publication number 20170090291
- Publication date Mar 30, 2017
- TOKYO ELECTRON LIMITED
- Kousuke YOSHIHARA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
DEVELOPING APPARATUS, DEVELOPING METHOD AND STORAGE MEDIUM
- Publication number 20170045821
- Publication date Feb 16, 2017
- TOKYO ELECTRON LIMITED
- Kousuke YOSHIHARA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND COMPUT...
- Publication number 20160314958
- Publication date Oct 27, 2016
- TOKYO ELECTRON LIMITED
- Yasushi TAKIGUCHI
- B08 - CLEANING
Information Patent Application
DEVELOPING TREATMENT APPARATUS AND DEVELOPING TREATMENT METHOD
- Publication number 20160202609
- Publication date Jul 14, 2016
- TOKYO ELECTRON LIMITED
- Yasushi TAKIGUCHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIQUID PROCESSING METHOD AND STORAGE MEDIUM
- Publication number 20160054653
- Publication date Feb 25, 2016
- TOKYO ELECTRON LIMITED
- Norihiko Sasagawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING APPARATUS, AND COMPUT...
- Publication number 20150194301
- Publication date Jul 9, 2015
- TOKYO ELECTRON LIMITED
- Ryoichi UEMURA
- B08 - CLEANING
Information Patent Application
DEVELOPING APPARATUS, DEVELOPING METHOD AND STORAGE MEDIUM
- Publication number 20150036110
- Publication date Feb 5, 2015
- TOKYO ELECTRON LIMITED
- Kousuke YOSHIHARA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVELOPING METHOD, DEVELOPING APPARATUS AND STORAGE MEDIUM
- Publication number 20150036109
- Publication date Feb 5, 2015
- TOKYO ELECTRON LIMITED
- Kousuke YOSHIHARA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND STORAG...
- Publication number 20150027492
- Publication date Jan 29, 2015
- TOKYO ELECTRON LIMITED
- Yasushi TAKIGUCHI
- B08 - CLEANING
Information Patent Application
LIQUID PROCESSING APPARATUS
- Publication number 20150027503
- Publication date Jan 29, 2015
- TOKYO ELECTRON LIMITED
- Yasushi TAKIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND COMPUT...
- Publication number 20140102474
- Publication date Apr 17, 2014
- TOKYO ELECTRON LIMITED
- Yasushi TAKIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVELOPING TREATMENT APPARATUS AND DEVELOPING TREATMENT METHOD
- Publication number 20140071411
- Publication date Mar 13, 2014
- TOKYO ELECTRON LIMITED
- Yasushi TAKIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD
- Publication number 20130118533
- Publication date May 16, 2013
- TOKYO ELECTRON LIMITED
- Yasushi Takiguchi
- B08 - CLEANING
Information Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD AND STORAGE M...
- Publication number 20120052190
- Publication date Mar 1, 2012
- TOKYO ELECTRON LIMITED
- Norihiko Sasagawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVELOPING APPARATUS, DEVELOPING METHOD AND STORAGE MEDIUM
- Publication number 20110200953
- Publication date Aug 18, 2011
- TOKYO ELECTRON LIMITED
- Hiroshi Arima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING AND DEVELOPING APPARATUS, DEVELOPING METHOD AND NON-TRANSIT...
- Publication number 20110200321
- Publication date Aug 18, 2011
- TOKYO ELECTRON LIMITED
- Yasushi Takiguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVELOPING APPARATUS, DEVELOPING METHOD AND STORAGE MEDIUM
- Publication number 20110200952
- Publication date Aug 18, 2011
- TOKYO ELECTRON LIMITED
- Yasushi Takiguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Yasushi Takiguchi

Person

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Substrate cleaning apparatus and substrate cleaning method

Substrate processing apparatus

Substrate processing apparatus and substrate processing method

Dressing apparatus and dressing method for substrate rear surface p...

Liquid processing apparatus

Substrate processing apparatus, substrate processing method and sto...

Liquid processing apparatus

Developing apparatus, developing method and storage medium

Liquid processing method and storage medium

Developing method, developing apparatus and storage medium

Liquid processing apparatus

Substrate cleaning apparatus, substrate cleaning method, and storag...

Substrate cleaning method, substrate cleaning apparatus, and comput...

Substrate cleaning method

Developing apparatus, developing method and storage medium

Substrate cleaning method, substrate cleaning apparatus, and comput...

Developing method, developing apparatus and storage medium

Developing treatment apparatus and developing treatment method

Developing treatment apparatus and developing treatment method

Liquid processing apparatus, liquid processing method and storage m...

Liquid processing apparatus and liquid processing method

Substrate cleaning apparatus, substrate cleaning method, and comput...

Developing apparatus, developing method and storage medium

Developing apparatus, developing method and storage medium

Coating and developing apparatus, developing method and non-transit...

Coating film forming apparatus and method

Coater cup

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

DRESSING APPARATUS AND DRESSING METHOD FOR SUBSTRATE REAR SURFACE P...

SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD

SUBSTRATE WARPAGE CORRECTION METHOD, COMPUTER STORAGE MEDIUM, AND S...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

LIQUID PROCESSING APPARATUS

DRESSING APPARATUS AND DRESSING METHOD FOR SUBSTRATE REAR SURFACE P...

Liquid Processing Apparatus

Substrate Processing Apparatus, Substrate Processing Method and Sto...

SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING APPARATUS, AND COMPUT...

DEVELOPING METHOD, DEVELOPING APPARATUS AND STORAGE MEDIUM

DEVELOPING APPARATUS, DEVELOPING METHOD AND STORAGE MEDIUM

SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND COMPUT...

DEVELOPING TREATMENT APPARATUS AND DEVELOPING TREATMENT METHOD

LIQUID PROCESSING METHOD AND STORAGE MEDIUM

SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING APPARATUS, AND COMPUT...

DEVELOPING APPARATUS, DEVELOPING METHOD AND STORAGE MEDIUM

DEVELOPING METHOD, DEVELOPING APPARATUS AND STORAGE MEDIUM

SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND STORAG...

LIQUID PROCESSING APPARATUS

SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND COMPUT...

DEVELOPING TREATMENT APPARATUS AND DEVELOPING TREATMENT METHOD

LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD

LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD AND STORAGE M...

DEVELOPING APPARATUS, DEVELOPING METHOD AND STORAGE MEDIUM

COATING AND DEVELOPING APPARATUS, DEVELOPING METHOD AND NON-TRANSIT...

DEVELOPING APPARATUS, DEVELOPING METHOD AND STORAGE MEDIUM