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Yasushi Taniyama

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Patents Grantslast 30 patents

  • Information Patent Grant

    Conveyance system for transferring frame wafer
    • Patent number 11,851,289
    • Issue date Dec 26, 2023
    • Sinfonia Technology Co., Ltd.
    • Hiroaki Nakamura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Wafer stocker
    • Patent number 11,823,934
    • Issue date Nov 21, 2023
    • Sinfonia Technology Co., Ltd.
    • Yasushi Taniyama
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Transfer chamber
    • Patent number 11,823,923
    • Issue date Nov 21, 2023
    • Sinfonia Technology Co., Ltd.
    • Toshihiro Kawai
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • Information Patent Grant

    Transport system
    • Patent number 11,710,652
    • Issue date Jul 25, 2023
    • Sinfonia Technology Co., Ltd.
    • Toshihiro Kawai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Exhaust nozzle unit, load port, and EFEM
    • Patent number 11,658,047
    • Issue date May 23, 2023
    • Sinfonia Technology Co., Ltd.
    • Atsushi Suzuki
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Grant

    Wafer stocker
    • Patent number 11,610,797
    • Issue date Mar 21, 2023
    • Sinfonia Technology Co., Ltd.
    • Yasushi Taniyama
    • F24 - HEATING RANGES VENTILATING
  • Information Patent Grant

    Transfer chamber
    • Patent number 11,424,145
    • Issue date Aug 23, 2022
    • SINFONIA TECHNOLOGY CO., LTD.
    • Toshihiro Kawai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Gas supply device, method for controlling gas supply device, load p...
    • Patent number 11,139,188
    • Issue date Oct 5, 2021
    • Sinfonia Technology Co., Ltd.
    • Yasushi Taniyama
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Load port
    • Patent number 10,947,063
    • Issue date Mar 16, 2021
    • SINFONIA TECHNOLOGY CO., LTD.
    • Atsushi Suzuki
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
  • Information Patent Grant

    Door opening/closing system, and load port equipped with door openi...
    • Patent number 10,930,537
    • Issue date Feb 23, 2021
    • SINFONIA TECHNOLOGY CO., LTD.
    • Toshihiro Kawai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Gas injection device
    • Patent number 10,923,372
    • Issue date Feb 16, 2021
    • SINFONIA TECHNOLOGY CO., LTD.
    • Toshihiro Kawai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Transfer chamber
    • Patent number 10,672,632
    • Issue date Jun 2, 2020
    • Sinfonia Technology Co., Ltd.
    • Toshihiro Kawai
    • C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
  • Information Patent Grant

    Transfer chamber
    • Patent number 10,658,217
    • Issue date May 19, 2020
    • Sinfonia Technology Co., Ltd.
    • Toshihiro Kawai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Door opening/closing system, and load port equipped with door openi...
    • Patent number 10,586,723
    • Issue date Mar 10, 2020
    • SINFONIA TECHNOLOGY CO., LTD.
    • Toshihiro Kawai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Load port
    • Patent number 10,501,271
    • Issue date Dec 10, 2019
    • SINFONIA TECHNOLOGY CO., LTD.
    • Atsushi Suzuki
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
  • Information Patent Grant

    EFEM
    • Patent number 9,704,727
    • Issue date Jul 11, 2017
    • Sinfonia Technology Co., Ltd.
    • Mikio Segawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Atmosphere replacement apparatus, substrate transport apparatus, su...
    • Patent number 9,412,634
    • Issue date Aug 9, 2016
    • Sinfonia Technology Co., Ltd.
    • Mikio Segawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Load port
    • Patent number 8,540,473
    • Issue date Sep 24, 2013
    • Sinfonia Technology Co., Ltd.
    • Fuminori Asa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Transportation apparatus and tension adjustment method of belt in t...
    • Patent number 7,987,742
    • Issue date Aug 2, 2011
    • Shinko Electric Co., Ltd.
    • Sachio Tachibana
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
  • Information Patent Grant

    Untreated body transfer device and semiconductor manufacturing devi...
    • Patent number 7,393,172
    • Issue date Jul 1, 2008
    • Tokyo Electron Limited
    • Hiroaki Saeki
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Port structure in semiconductor processing system
    • Patent number 7,279,067
    • Issue date Oct 9, 2007
    • Tokyo Electron Limited
    • Tetsuo Yoshida
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Mounting/demounting device for wafer carrier lid
    • Patent number 6,984,097
    • Issue date Jan 10, 2006
    • Tokyo Electron Limited
    • Hiroaki Saeki
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Device for attaching target substrate transfer container to semicon...
    • Patent number 6,676,356
    • Issue date Jan 13, 2004
    • Tokyo Electron Limited
    • Hiroaki Saeki
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Semiconductor processing system
    • Patent number 6,540,869
    • Issue date Apr 1, 2003
    • Tokyo Electron Limited
    • Hiroaki Saeki
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    TRANSFER CHAMBER
    • Publication number 20240038554
    • Publication date Feb 1, 2024
    • SINFONIA TECHNOLOGY CO., LTD.
    • Toshihiro Kawai
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • Information Patent Application

    WAFER STOCKER
    • Publication number 20230207367
    • Publication date Jun 29, 2023
    • SINFONIA TECHNOLOGY CO., LTD.
    • Yasushi Taniyama
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CONVEYANCE SYSTEM
    • Publication number 20230033168
    • Publication date Feb 2, 2023
    • SINFONIA TECHNOLOGY CO., LTD.
    • Hiroaki Nakamura
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
  • Information Patent Application

    TRANSFER CHAMBER
    • Publication number 20220344182
    • Publication date Oct 27, 2022
    • SINFONIA TECHNOLOGY CO., LTD.
    • Toshihiro Kawai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TRANSPORT SYSTEM
    • Publication number 20220336245
    • Publication date Oct 20, 2022
    • SINFONIA TECHNOLOGY CO., LTD.
    • Toshihiro Kawai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WAFER STOCKER
    • Publication number 20220037184
    • Publication date Feb 3, 2022
    • SINFONIA TECHNOLOGY CO., LTD.
    • Yasushi Taniyama
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TRANSFER CHAMBER
    • Publication number 20200312686
    • Publication date Oct 1, 2020
    • SINFONIA TECHNOLOGY CO., LTD.
    • Toshihiro Kawai
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • Information Patent Application

    DOOR OPENING/CLOSING SYSTEM, AND LOAD PORT EQUIPPED WITH DOOR OPENI...
    • Publication number 20200168495
    • Publication date May 28, 2020
    • SINFONIA TECHNOLOGY CO., LTD.
    • Toshihiro KAWAI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    LOAD PORT
    • Publication number 20200071091
    • Publication date Mar 5, 2020
    • SINFONIA TECHNOLOGY CO., LTD.
    • Atsushi SUZUKI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    EXHAUST NOZZLE UNIT, LOAD PORT, AND EFEM
    • Publication number 20190326134
    • Publication date Oct 24, 2019
    • SINFONIA TECHNOLOGY CO., LTD.
    • Atsushi Suzuki
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Application

    METHOD FOR MANUFACTURING SEMICONDUCTOR
    • Publication number 20190145641
    • Publication date May 16, 2019
    • SINFONIA TECHNOLOGY CO., LTD.
    • Yasushi Taniyama
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    GAS SUPPLY DEVICE, METHOD FOR CONTROLLING GAS SUPPLY DEVICE, LOAD P...
    • Publication number 20180315632
    • Publication date Nov 1, 2018
    • SINFONIA TECHNOLOGY CO., LTD.
    • Yasushi Taniyama
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    GAS INJECTION DEVICE
    • Publication number 20180254209
    • Publication date Sep 6, 2018
    • SINFONIA TECHNOLOGY CO., LTD.
    • Toshihiro KAWAI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    LOAD PORT
    • Publication number 20180229945
    • Publication date Aug 16, 2018
    • SINFONIA TECHNOLOGY CO., LTD.
    • Atsushi SUZUKI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    DOOR OPENING/CLOSING SYSTEM, AND LOAD PORT EQUIPPED WITH DOOR OPENI...
    • Publication number 20180204753
    • Publication date Jul 19, 2018
    • SINFONIA TECHNOLOGY CO., LTD.
    • Toshihiro KAWAI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TRANSFER CHAMBER
    • Publication number 20180047602
    • Publication date Feb 15, 2018
    • SINFONIA TECHNOLOGY CO., LTD.
    • Toshihiro Kawai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TRANSFER CHAMBER
    • Publication number 20180040493
    • Publication date Feb 8, 2018
    • SINFONIA TECHNOLOGY CO., LTD.
    • Toshihiro Kawai
    • C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
  • Information Patent Application

    EFEM
    • Publication number 20150170945
    • Publication date Jun 18, 2015
    • SINFONIA TECHNOLOGY CO., LTD.
    • Mikio Segawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ATMOSPHERE REPLACEMENT APPARATUS, SUBSTRATE TRANSPORT APPARATUS, SU...
    • Publication number 20150128441
    • Publication date May 14, 2015
    • SINFONIA TECHNOLOGY CO., LTD.
    • Mikio Segawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    EFEM AND LOAD PORT
    • Publication number 20150024671
    • Publication date Jan 22, 2015
    • SINFONIA TECHNOLOGY CO., LTD.
    • Yasushi Taniyama
    • F24 - HEATING RANGES VENTILATING
  • Information Patent Application

    LOAD PORT
    • Publication number 20120034051
    • Publication date Feb 9, 2012
    • SINFONIA TECHNOLOGY CO., LTD.
    • Fuminori ASA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Transportation apparatus and tension adjustment method of belt in t...
    • Publication number 20080152465
    • Publication date Jun 26, 2008
    • SHINKO ELECTRIC CO., LTD.
    • Sachio Tachibana
    • B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
  • Information Patent Application

    Port structure in semiconductor processing system
    • Publication number 20050103270
    • Publication date May 19, 2005
    • TOKYO ELECTRON LIMITED
    • Tetsuo Yoshida
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Apparatus for detaching/attaching wafer carrier lid
    • Publication number 20020179892
    • Publication date Dec 5, 2002
    • Hiroaki Saeki
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Device for attaching target substrate transfer container to semicon...
    • Publication number 20020051701
    • Publication date May 2, 2002
    • Hiroaki Saeki
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Semiconductor processing system
    • Publication number 20010053324
    • Publication date Dec 20, 2001
    • Hiroaki Saeki
    • H01 - BASIC ELECTRIC ELEMENTS