Yasushi Yasumatsu

Person

Kawasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Ion beam processing apparatus, electrode assembly, and method of cl...
- Patent number 12,119,203
- Issue date Oct 15, 2024
- Canon Anelva Corporation
- Yasushi Yasumatsu
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,694,882
- Issue date Jul 4, 2023
- Canon Anelva Corporation
- Yuji Takanami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Grid assembly and ion beam etching apparatus
- Patent number 11,508,545
- Issue date Nov 22, 2022
- CANON ANELVA CORPORATION
- Masashi Tsujiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam processing apparatus, electrode assembly, and method of cl...
- Patent number 11,355,314
- Issue date Jun 7, 2022
- Canon Anelva Corporation
- Yasushi Yasumatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,270,873
- Issue date Mar 8, 2022
- Canon Anelva Corporation
- Yuji Takanami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion beam processing apparatus, electrode assembly, and method of cl...
- Patent number 10,879,040
- Issue date Dec 29, 2020
- Canon Anelva Corporation
- Yasushi Yasumatsu
- B08 - CLEANING
Information Patent Grant
Sputtering apparatus and substrate processing apparatus
- Patent number 10,615,012
- Issue date Apr 7, 2020
- Canon Anelva Corporation
- Shigenori Ishihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion beam processing apparatus, electrode assembly, and method of cl...
- Patent number 10,224,179
- Issue date Mar 5, 2019
- Canon Anelva Corporation
- Yasushi Yasumatsu
- B08 - CLEANING
Information Patent Grant
Sputtering apparatus and substrate processing apparatus
- Patent number 10,062,551
- Issue date Aug 28, 2018
- Canon Anelva Corporation
- Shigenori Ishihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus and substrate processing apparatus
- Patent number 9,997,339
- Issue date Jun 12, 2018
- Canon Anelva Corporation
- Shigenori Ishihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Grid, method of manufacturing the same, and ion beam processing app...
- Patent number 9,721,747
- Issue date Aug 1, 2017
- Canon Anelva Corporation
- Masashi Tsujiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus and shield
- Patent number 9,583,304
- Issue date Feb 28, 2017
- Canon Anelva Corporation
- Yasushi Yasumatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus and shield
- Patent number 9,422,619
- Issue date Aug 23, 2016
- Canon Anelva Corporation
- Yasushi Yasumatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film-forming apparatus
- Patent number 9,322,094
- Issue date Apr 26, 2016
- Canon Anelva Corporation
- Yuji Kajihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film-forming apparatus
- Patent number 9,322,095
- Issue date Apr 26, 2016
- Canon Anelva Corporation
- Yuji Kajihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film-forming apparatus
- Patent number 9,109,285
- Issue date Aug 18, 2015
- Canon Anelva Corporation
- Yuji Kajihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CL...
- Publication number 20220262598
- Publication date Aug 18, 2022
- Canon ANELVA Corporation
- Yasushi Yasumatsu
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220139686
- Publication date May 5, 2022
- Canon ANELVA Corporation
- Yuji TAKANAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CL...
- Publication number 20210104377
- Publication date Apr 8, 2021
- Canon ANELVA Corporation
- Yasushi Yasumatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20200343080
- Publication date Oct 29, 2020
- Canon ANELVA Corporation
- Yuji TAKANAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CL...
- Publication number 20190108973
- Publication date Apr 11, 2019
- Canon ANELVA Corporation
- Yasushi Yasumatsu
- B08 - CLEANING
Information Patent Application
SPUTTERING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180261440
- Publication date Sep 13, 2018
- Canon ANELVA Corporation
- Shigenori Ishihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GRID, METHOD OF MANUFACTURING THE SAME, AND ION BEAM PROCESSING APP...
- Publication number 20170084419
- Publication date Mar 23, 2017
- Canon ANELVA Corporation
- Masashi Tsujiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM ETCHING APPARATUS AND ION BEAM GENERATOR
- Publication number 20160351377
- Publication date Dec 1, 2016
- Canon ANELVA Corporation
- Naoyuki OKAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CL...
- Publication number 20160056016
- Publication date Feb 25, 2016
- Canon ANELVA Corporation
- Yasushi Yasumatsu
- B08 - CLEANING
Information Patent Application
GRID ASSEMBLY AND ION BEAM ETCHING APPARATUS
- Publication number 20150287567
- Publication date Oct 8, 2015
- Canon ANELVA Corporation
- MASASHI TSUJIYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPUTTERING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20150262796
- Publication date Sep 17, 2015
- Canon ANELVA Corporation
- Shigenori ISHIHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPUTTERING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20150262797
- Publication date Sep 17, 2015
- Canon ANELVA Corporation
- Shigenori ISHIHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPUTTERING APPARATUS
- Publication number 20140291148
- Publication date Oct 2, 2014
- Toru ISHIMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING DEVICE AND SHIELD
- Publication number 20140283743
- Publication date Sep 25, 2014
- Canon ANELVA Corporation
- Yasushi Yasumatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING APPARATUS AND SHIELD
- Publication number 20140262766
- Publication date Sep 18, 2014
- Canon ANELVA Corporation
- Yasushi Yasumatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING APPARATUS
- Publication number 20140102889
- Publication date Apr 17, 2014
- Canon ANELVA Corporation
- Yuji Kajihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING APPARATUS
- Publication number 20140054167
- Publication date Feb 27, 2014
- Canon ANELVA Corporation
- Yuji Kajihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING APPARATUS
- Publication number 20140034489
- Publication date Feb 6, 2014
- Canon ANELVA Corporation
- Yuji Kajihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Yasushi Yasumatsu

Person

Patents Grantslast 30 patents

Ion beam processing apparatus, electrode assembly, and method of cl...

Substrate processing apparatus and substrate processing method

Grid assembly and ion beam etching apparatus

Ion beam processing apparatus, electrode assembly, and method of cl...

Substrate processing apparatus and substrate processing method

Ion beam processing apparatus, electrode assembly, and method of cl...

Sputtering apparatus and substrate processing apparatus

Ion beam processing apparatus, electrode assembly, and method of cl...

Sputtering apparatus and substrate processing apparatus

Sputtering apparatus and substrate processing apparatus

Grid, method of manufacturing the same, and ion beam processing app...

Processing apparatus and shield

Processing apparatus and shield

Film-forming apparatus

Film-forming apparatus

Film-forming apparatus

Patents Applicationslast 30 patents

ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CL...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CL...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CL...

SPUTTERING APPARATUS AND SUBSTRATE PROCESSING APPARATUS

GRID, METHOD OF MANUFACTURING THE SAME, AND ION BEAM PROCESSING APP...

ION BEAM ETCHING APPARATUS AND ION BEAM GENERATOR

ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CL...

GRID ASSEMBLY AND ION BEAM ETCHING APPARATUS

SPUTTERING APPARATUS AND SUBSTRATE PROCESSING APPARATUS

SPUTTERING APPARATUS AND SUBSTRATE PROCESSING APPARATUS

SPUTTERING APPARATUS

PROCESSING DEVICE AND SHIELD

PROCESSING APPARATUS AND SHIELD

FILM-FORMING APPARATUS

FILM-FORMING APPARATUS

FILM-FORMING APPARATUS