Yasushi Yoda

Person

Chibashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus and exposure method, and device manufacturing me...
- Patent number 9,772,564
- Issue date Sep 26, 2017
- Nikon Corporation
- Yasushi Yoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, device production method, cleaning apparatus, c...
- Patent number 8,189,168
- Issue date May 29, 2012
- Nikon Corporation
- Hiroyuki Nagasaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage device and exposure apparatus, and method of manufacturing a...
- Patent number 6,654,100
- Issue date Nov 25, 2003
- Nikon Corporation
- Yasushi Yoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage apparatus including non-containing gas bearings and microlith...
- Patent number 6,583,597
- Issue date Jun 24, 2003
- Nikon Corporation
- Keiichi Tanaka
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE APPARATUS AND EXPOSURE METHOD, AND DEVICE MANUFACTURING ME...
- Publication number 20170371249
- Publication date Dec 28, 2017
- Nikon Corporation
- Yasushi Yoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND EXPOSURE METHOD, AND DEVICE MANUFACTURING ME...
- Publication number 20140132940
- Publication date May 15, 2014
- Nikon Corporation
- Yasushi Yoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, DEVICE PRODUCTION METHOD, CLEANING APPARATUS, C...
- Publication number 20120204913
- Publication date Aug 16, 2012
- Nikon Corporation
- Hiroyuki Nagasaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, device production method, cleaning apparatus, c...
- Publication number 20090251672
- Publication date Oct 8, 2009
- Nikon Corporation
- Hiroyuki Nagasaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Maintenance method, exposure method and apparatus and device manufa...
- Publication number 20090103064
- Publication date Apr 23, 2009
- Nikon Corporation
- Yasushi Yoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Movable Body System, Exposure Apparatus, And Device Manufacturing M...
- Publication number 20080123067
- Publication date May 29, 2008
- Nikon Corporation
- Yasushi Yoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, device manufacturing method, cleaning method, a...
- Publication number 20080055575
- Publication date Mar 6, 2008
- Nikon Corporation
- Hiroyuki Nagasaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Shock-absorber units for use in a vacuum chamber for braking runawa...
- Publication number 20040075201
- Publication date Apr 22, 2004
- NIKON CORPORATION
- Yasushi Yoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage devices exhibiting reduced deformation, and microlithography...
- Publication number 20030178579
- Publication date Sep 25, 2003
- NIKON CORPORATION
- Keiichi Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage apparatus including non-containing gas bearings and microlith...
- Publication number 20020070699
- Publication date Jun 13, 2002
- NIKON CORPORATION
- Keiichi Tanaka
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Stage device and exposure apparatus, and method of manufacturing a...
- Publication number 20020015140
- Publication date Feb 7, 2002
- NIKON CORPORATION
- Yasushi Yoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Yasushi Yoda

Person

Patents Grantslast 30 patents

Exposure apparatus and exposure method, and device manufacturing me...

Exposure apparatus, device production method, cleaning apparatus, c...

Stage device and exposure apparatus, and method of manufacturing a...

Stage apparatus including non-containing gas bearings and microlith...

Patents Applicationslast 30 patents

EXPOSURE APPARATUS AND EXPOSURE METHOD, AND DEVICE MANUFACTURING ME...

EXPOSURE APPARATUS AND EXPOSURE METHOD, AND DEVICE MANUFACTURING ME...

EXPOSURE APPARATUS, DEVICE PRODUCTION METHOD, CLEANING APPARATUS, C...

Exposure apparatus, device production method, cleaning apparatus, c...

Maintenance method, exposure method and apparatus and device manufa...

Movable Body System, Exposure Apparatus, And Device Manufacturing M...

Exposure apparatus, device manufacturing method, cleaning method, a...

Shock-absorber units for use in a vacuum chamber for braking runawa...

Stage devices exhibiting reduced deformation, and microlithography...

Stage apparatus including non-containing gas bearings and microlith...

Stage device and exposure apparatus, and method of manufacturing a...