Yasutaka HAMA

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and plasma processing apparatus
- Patent number 11,881,410
- Issue date Jan 23, 2024
- Tokyo Electron Limited
- Yasutaka Hama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method
- Patent number 11,705,309
- Issue date Jul 18, 2023
- Tokyo Electron Limited
- Yasutaka Hama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,201,063
- Issue date Dec 14, 2021
- Tokyo Electron Limited
- Yasutaka Hama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for processing target object
- Patent number 10,998,223
- Issue date May 4, 2021
- Tokyo Electron Limited
- Seiji Yokoyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method
- Patent number 10,950,458
- Issue date Mar 16, 2021
- Tokyo Electron Limited
- Yasutaka Hama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for processing target objection
- Patent number 10,297,496
- Issue date May 21, 2019
- Tokyo Electron Limited
- Yasutaka Hama
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND PLASMA PROCESSING APPARATUS
- Publication number 20220068658
- Publication date Mar 3, 2022
- TOKYO ELECTRON LIMITED
- Yasutaka HAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210175049
- Publication date Jun 10, 2021
- TOKYO ELECTRON LIMITED
- Yasutaka HAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200328089
- Publication date Oct 15, 2020
- TOKYO ELECTRON LIMITED
- Yasutaka HAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD
- Publication number 20190214269
- Publication date Jul 11, 2019
- TOKYO ELECTRON LIMITED
- Yasutaka Hama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PROCESSING TARGET OBJECT
- Publication number 20190043753
- Publication date Feb 7, 2019
- TOKYO ELECTRON LIMITED
- Seiji YOKOYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PROCESSING TARGET OBJECT
- Publication number 20180269101
- Publication date Sep 20, 2018
- TOKYO ELECTRON LIMITED
- Yasutaka HAMA
- H01 - BASIC ELECTRIC ELEMENTS