Yasutaka HAMA

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Hsin-chu City, TW

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Patents Grantslast 30 patents

Information Patent Grant
Method of cleaning plasma processing apparatus and plasma processin...
- Patent number 11,887,824
- Issue date Jan 30, 2024
- Tokyo Electron Limited
- Yasutaka Hama
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20240222095
- Publication date Jul 4, 2024
- TOKYO ELECTRON LIMITED
- Takashi YAMAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CLEANING PLASMA PROCESSING APPARATUS AND PLASMA PROCESSIN...
- Publication number 20240063000
- Publication date Feb 22, 2024
- TOKYO ELECTRON LIMITED
- Yasutaka HAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CLEANING PLASMA PROCESSING APPARATUS AND PLASMA PROCESSIN...
- Publication number 20220037133
- Publication date Feb 3, 2022
- TOKYO ELECTRON LIMITED
- Yasutaka HAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20210233793
- Publication date Jul 29, 2021
- TOKYO ELECTRON LIMITED
- Yasutaka HAMA
- H01 - BASIC ELECTRIC ELEMENTS