Yasutaka Soma

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate conveyance apparatus and substrate peeling system
- Patent number 9,679,798
- Issue date Jun 13, 2017
- Tokyo Electron Limited
- Yasuharu Iwashita
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SEPARATION APPARATUS, SEPARATION SYSTEM, SEPARATION METHOD AND NON-...
- Publication number 20140284000
- Publication date Sep 25, 2014
- Yasutaka SOMA
- B32 - LAYERED PRODUCTS
Information Patent Application
SUBSTRATE CONVEYANCE APPARATUS AND SUBSTRATE PEELING SYSTEM
- Publication number 20140234033
- Publication date Aug 21, 2014
- TOKYO ELECTRON LIMITED
- Yasuharu IWASHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING METHOD AND CLEANING APPARATUS
- Publication number 20130000684
- Publication date Jan 3, 2013
- TOKYO ELECTRON LIMITED
- Yasutaka SOMA
- B32 - LAYERED PRODUCTS