Yasutaka Souma

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Nozzle cleaning method and a computer-readable storage medium stori...
- Patent number 8,562,753
- Issue date Oct 22, 2013
- Tokyo Electron Limited
- Takeshi Hirao
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Nozzle cleaning apparatus, nozzle cleaning method, and a computer-r...
- Patent number 7,891,365
- Issue date Feb 22, 2011
- Tokyo Electron Limited
- Takeshi Hirao
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Thermal treatment equipment and thermal treatment method
- Patent number 7,050,710
- Issue date May 23, 2006
- Tokyo Electron Limited
- Hiroshi Shinya
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
NOZZLE CLEANING APPARATUS, NOZZLE CLEANING METHOD AND A COMPUTER-RE...
- Publication number 20110083702
- Publication date Apr 14, 2011
- TOKYO ELECTRON LIMITED
- Takeshi Hirao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NOZZLE CLEANING APPARATUS, NOZZLE CLEANING METHOD AND A COMPUTER-RE...
- Publication number 20110083703
- Publication date Apr 14, 2011
- TOKYO ELECTRON LIMITED
- Takeshi Hirao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Nozzle cleaning apparatus, nozzle cleaning method, and a computer-r...
- Publication number 20080023034
- Publication date Jan 31, 2008
- Takeshi Hirao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thermal treatment equipment and thermal treatment method
- Publication number 20040245237
- Publication date Dec 9, 2004
- Hiroshi Shinya
- H01 - BASIC ELECTRIC ELEMENTS