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Mito, JP
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last 30 patents
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Patent Grant
Pattern measurement apparatus
Patent number
8,788,242
Issue date
Jul 22, 2014
Hitachi High-Technologies Corporation
Ryoichi Matsuoka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
PATTERN MEASUREMENT APPARATUS
Publication number
20120053892
Publication date
Mar 1, 2012
Hitachi High-Technologies Corporation
Ryoichi Matsuoka
B82 - NANO-TECHNOLOGY