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Suwa, JP
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last 30 patents
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Patent Grant
Micropump with valve structure
Patent number
5,259,737
Issue date
Nov 9, 1993
Seiko Epson Corporation
Shinichi Kamisuki
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Two-valve thin plate micropump
Patent number
5,171,132
Issue date
Dec 15, 1992
Seiko Epson Corporation
Hajime Miyazaki
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE