Yasutomo KIMURA

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Iwate, JP

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Patents Grantslast 30 patents

Information Patent Grant
Rotational drive device, substrate processing apparatus, and rotati...
- Patent number 11,885,003
- Issue date Jan 30, 2024
- Tokyo Electron Limited
- Junnosuke Taguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20230061423
- Publication date Mar 2, 2023
- TOKYO ELECTRON LIMITED
- Junnosuke TAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ROTATIONAL DRIVE DEVICE, SUBSTRATE PROCESSING APPARATUS, AND ROTATI...
- Publication number 20210180187
- Publication date Jun 17, 2021
- TOKYO ELECTRON LIMITED
- Junnosuke TAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...