Yasutoshi Tsubota

Person

Toyama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,154,826
- Issue date Nov 26, 2024
- Kokusai Electric Corporation
- Masanori Nakayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,040,161
- Issue date Jul 16, 2024
- Kokusai Electric Corporation
- Yasutoshi Tsubota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 11,908,682
- Issue date Feb 20, 2024
- Kokusai Electric Corporation
- Hiroto Igawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 11,869,748
- Issue date Jan 9, 2024
- Kokusai Electric Corporation
- Takeshi Yasui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 11,664,275
- Issue date May 30, 2023
- Kokusai Electric Corporation
- Masanori Nakayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device and non-transitory com...
- Patent number 11,189,483
- Issue date Nov 30, 2021
- Kokusai Electric Corporation
- Yuichiro Takeshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device, and recording medium
- Patent number 11,081,362
- Issue date Aug 3, 2021
- Kokusai Electric Corporation
- Yuki Yamakado
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 10,796,900
- Issue date Oct 6, 2020
- Kokusai Electric Corporation
- Yuichiro Takeshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for removing adhering matter and dry etching method
- Patent number 10,153,153
- Issue date Dec 11, 2018
- CENTRAL GLASS COMPANY, LIMITED
- Akiou Kikuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for removing adhering matter and dry etching method
- Patent number 10,121,647
- Issue date Nov 6, 2018
- CENTRAL GLASS COMPANY, LIMITED
- Akiou Kikuchi
- B08 - CLEANING
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 9,974,191
- Issue date May 15, 2018
- Hitachi Kokusai Electric Inc.
- Yasutoshi Tsubota
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Atomic layer deposition processing apparatus to reduce heat energy...
- Patent number 9,518,321
- Issue date Dec 13, 2016
- Hitachi Kokusai Electric Inc.
- Mitsuro Tanabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and a method of manufacturing a semi...
- Patent number 9,472,424
- Issue date Oct 18, 2016
- Hitachi Kokusai Electric Inc.
- Katsuyoshi Hamano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and a method of manufacturing a semi...
- Patent number 9,236,246
- Issue date Jan 12, 2016
- Hitachi Kokusai Electric Inc.
- Katsuyoshi Hamano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 9,147,573
- Issue date Sep 29, 2015
- Hitachi Kokusai Electric Inc.
- Yasutoshi Tsubota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240243019
- Publication date Jul 18, 2024
- Kokusai Electric Corporation
- Yuichiro TAKESHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240194476
- Publication date Jun 13, 2024
- Kokusai Electric Corporation
- Yasutoshi TSUBOTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus and Method of Manufacturing Semicond...
- Publication number 20240096597
- Publication date Mar 21, 2024
- Kokusai Electric Corporation
- Takeshi YASUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20230307295
- Publication date Sep 28, 2023
- Kokusai Electric Corporation
- Masanori NAKAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING METHOD, RECORDING MEDIUM, AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230201889
- Publication date Jun 29, 2023
- Kokusai Electric Corporation
- Yuki YAMAKADO
- B08 - CLEANING
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230097621
- Publication date Mar 30, 2023
- Kokusai Electric Corporation
- Hiroto IGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230097581
- Publication date Mar 30, 2023
- Kokusai Electric Corporation
- Yasutoshi TSUBOTA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20220328289
- Publication date Oct 13, 2022
- Kokusai Electric Corporation
- Yasutoshi TSUBOTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING...
- Publication number 20220301863
- Publication date Sep 22, 2022
- Kokusai Electric Corporation
- Tatsushi UEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Manufacturing Semiconductor Device, Substrate Processing...
- Publication number 20220139675
- Publication date May 5, 2022
- Kokusai Electric Corporation
- Yuki YAMAKADO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUSCEPTOR COVER, METHOD OF MANUFACT...
- Publication number 20220139760
- Publication date May 5, 2022
- Kokusai Electric Corporation
- Yasutoshi TSUBOTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Manufacturing Semiconductor Device, Substrate Processing...
- Publication number 20220084816
- Publication date Mar 17, 2022
- Kokusai Electric Corporation
- Keita ICHIMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20220005673
- Publication date Jan 6, 2022
- Kokusai Electric Corporation
- Yasutoshi TSUBOTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Manufacturing Semiconductor Device, Substrate Processing...
- Publication number 20210305045
- Publication date Sep 30, 2021
- Kokusai Electric Corporation
- Tatsushi UEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Manufacturing Semiconductor Device, Substrate Processing...
- Publication number 20210183645
- Publication date Jun 17, 2021
- Kokusai Electric Corporation
- Hiroto IGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus and Method of Manufacturing Semicond...
- Publication number 20200402774
- Publication date Dec 24, 2020
- Kokusai Electric Corporation
- Takeshi YASUI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20200211858
- Publication date Jul 2, 2020
- Kokusai Electric Corporation
- Masanori NAKAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM
- Publication number 20200098587
- Publication date Mar 26, 2020
- Kokusai Electric Corporation
- Yuki YAMAKADO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20190355575
- Publication date Nov 21, 2019
- Kokusai Electric Corporation
- Yuichiro TAKESHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Manufacturing Semiconductor Device and Non-transitory Com...
- Publication number 20190348282
- Publication date Nov 14, 2019
- Kokusai Electric Corporation
- Yuichiro TAKESHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR REMOVING ADHERING MATTER AND DRY ETCHING METHOD
- Publication number 20170200602
- Publication date Jul 13, 2017
- Central Glass Company, Limited
- Akiou KIKUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20160211151
- Publication date Jul 21, 2016
- Hitachi Kokusai Electric Inc.
- Yasutoshi TSUBOTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...
- Publication number 20160155630
- Publication date Jun 2, 2016
- Hitachi Kokusai Electric Inc.
- Yasutoshi TSUBOTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND A METHOD OF MANUFACTURING A SEMI...
- Publication number 20160086818
- Publication date Mar 24, 2016
- Hitachi Kokusai Electric Inc.
- Katsuyoshi HAMANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20160079101
- Publication date Mar 17, 2016
- Hitachi Kokusai Electric Inc.
- Hidehiro YANAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER DEPOSITION PROCESSING APPARATUS TO REDUCE HEAT ENERGY...
- Publication number 20160032457
- Publication date Feb 4, 2016
- Hitachi Kokusai Electric Inc.
- Mitsuro TANABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20150334849
- Publication date Nov 19, 2015
- Hitachi Kokusai Electric Inc.
- Yasutoshi TSUBOTA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Substrate Processing Apparatus and Method of Manufacturing Semicond...
- Publication number 20140057456
- Publication date Feb 27, 2014
- Hitachi Kokusai Electric Inc.
- Yasutoshi Tsubota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND A METHOD OF MANUFACTURING A SEMI...
- Publication number 20120225566
- Publication date Sep 6, 2012
- Hitachi Kokusai Electric Inc.
- Katsuyoshi Hamano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Yasutoshi Tsubota

Person

Patents Grantslast 30 patents

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device, substrate processing...

Substrate processing apparatus and method of manufacturing semicond...

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device and non-transitory com...

Method of manufacturing semiconductor device, and recording medium

Method of manufacturing semiconductor device

Method for removing adhering matter and dry etching method

Method for removing adhering matter and dry etching method

Method of manufacturing semiconductor device, substrate processing...

Atomic layer deposition processing apparatus to reduce heat energy...

Substrate processing apparatus and a method of manufacturing a semi...

Substrate processing apparatus and a method of manufacturing a semi...

Substrate processing apparatus and method of manufacturing semicond...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

Substrate Processing Apparatus and Method of Manufacturing Semicond...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

CLEANING METHOD, RECORDING MEDIUM, AND SUBSTRATE PROCESSING APPARATUS

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING...

Method of Manufacturing Semiconductor Device, Substrate Processing...

SUBSTRATE PROCESSING APPARATUS, SUSCEPTOR COVER, METHOD OF MANUFACT...

Method of Manufacturing Semiconductor Device, Substrate Processing...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

Method of Manufacturing Semiconductor Device, Substrate Processing...

Method of Manufacturing Semiconductor Device, Substrate Processing...

Substrate Processing Apparatus and Method of Manufacturing Semicond...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

Method of Manufacturing Semiconductor Device and Non-transitory Com...

METHOD FOR REMOVING ADHERING MATTER AND DRY ETCHING METHOD

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...

SUBSTRATE PROCESSING APPARATUS AND A METHOD OF MANUFACTURING A SEMI...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

ATOMIC LAYER DEPOSITION PROCESSING APPARATUS TO REDUCE HEAT ENERGY...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

Substrate Processing Apparatus and Method of Manufacturing Semicond...

SUBSTRATE PROCESSING APPARATUS AND A METHOD OF MANUFACTURING A SEMI...