Yasutoshi Umehara

Person

Otaru, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Film thickness measuring system and film thickness measuring method
- Patent number 11,519,717
- Issue date Dec 6, 2022
- Tokyo Electron Limited
- Yasutoshi Umehara
- G01 - MEASURING TESTING
Information Patent Grant
Film thickness measurement device and correction method
- Patent number 11,226,191
- Issue date Jan 18, 2022
- Tokyo Electron Limited
- Yasutoshi Umehara
- G01 - MEASURING TESTING
Information Patent Grant
Process monitoring device and process monitoring method in semicond...
- Patent number 8,989,477
- Issue date Mar 24, 2015
- Tokyo Electron Limited
- Yasutoshi Umehara
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Abnormality detection system, abnormality detection method, recordi...
- Patent number 8,751,196
- Issue date Jun 10, 2014
- Tokyo Electron Limited
- Tsuyoshi Moriya
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Voltage and displacement measuring apparatus and probe
- Patent number 5,999,005
- Issue date Dec 7, 1999
- Fujitsu Limited
- Akira Fujii
- G01 - MEASURING TESTING
Information Patent Grant
Voltage and displacement measuring apparatus and probe
- Patent number 5,677,635
- Issue date Oct 14, 1997
- Fujitsu Limited
- Akira Fujii
- G01 - MEASURING TESTING
Information Patent Grant
Signal measuring apparatus and signal measuring method
- Patent number 5,550,479
- Issue date Aug 27, 1996
- Fujitsu Limited
- Shinichi Wakana
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
DETERMINATION METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250067664
- Publication date Feb 27, 2025
- TOKYO ELECTRON LIMITED
- Hirokazu UEDA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
LIGHT SOURCE, SPECTROSCOPIC ANALYSIS SYSTEM, AND SPECTROSCOPIC ANAL...
- Publication number 20230168124
- Publication date Jun 1, 2023
- TOKYO ELECTRON LIMITED
- Yasutoshi UMEHARA
- G01 - MEASURING TESTING
Information Patent Application
FILM THICKNESS MEASURING SYSTEM AND FILM THICKNESS MEASURING METHOD
- Publication number 20210293531
- Publication date Sep 23, 2021
- TOKYO ELECTRON LIMITED
- Yasutoshi UMEHARA
- G01 - MEASURING TESTING
Information Patent Application
FILM THICKNESS MEASUREMENT DEVICE AND CORRECTION METHOD
- Publication number 20210270597
- Publication date Sep 2, 2021
- TOKYO ELECTRON LIMITED
- Yasutoshi UMEHARA
- G01 - MEASURING TESTING
Information Patent Application
MAINTENANCE CONTROL METHOD OF CONTROLLING MAINTENANCE OF PROCESSING...
- Publication number 20200126829
- Publication date Apr 23, 2020
- TOKYO ELECTRON LIMITED
- Hidefumi MATSUI
- G05 - CONTROLLING REGULATING
Information Patent Application
X-RAY INSPECTION METHOD AND X-RAY INSPECTION DEVICE
- Publication number 20150055754
- Publication date Feb 26, 2015
- TOKYO ELECTRON LIMITED
- Yasutoshi UMEHARA
- G01 - MEASURING TESTING
Information Patent Application
PROCESS MONITORING DEVICE AND PROCESS MONITORING METHOD IN SEMICOND...
- Publication number 20130236088
- Publication date Sep 12, 2013
- TOKYO ELECTRON LIMITED
- Yasutoshi UMEHARA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ABNORMALITY DETECTION SYSTEM, ABNORMALITY DETECTION METHOD, AND REC...
- Publication number 20120109582
- Publication date May 3, 2012
- TOKYO ELECTRON LIMITED
- Tsuyoshi Moriya
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
INFORMATION PROCESSING DEVICE, INFORMATION PROCESSING METHOD AND PR...
- Publication number 20100153065
- Publication date Jun 17, 2010
- TOKYO ELECTRON LIMITED
- Kazuhiro KAWAMURA
- G05 - CONTROLLING REGULATING

Yasutoshi Umehara

Person

Patents Grantslast 30 patents

Film thickness measuring system and film thickness measuring method

Film thickness measurement device and correction method

Process monitoring device and process monitoring method in semicond...

Abnormality detection system, abnormality detection method, recordi...

Voltage and displacement measuring apparatus and probe

Voltage and displacement measuring apparatus and probe

Signal measuring apparatus and signal measuring method

Patents Applicationslast 30 patents

DETERMINATION METHOD AND SUBSTRATE PROCESSING APPARATUS

LIGHT SOURCE, SPECTROSCOPIC ANALYSIS SYSTEM, AND SPECTROSCOPIC ANAL...

FILM THICKNESS MEASURING SYSTEM AND FILM THICKNESS MEASURING METHOD

FILM THICKNESS MEASUREMENT DEVICE AND CORRECTION METHOD

MAINTENANCE CONTROL METHOD OF CONTROLLING MAINTENANCE OF PROCESSING...

X-RAY INSPECTION METHOD AND X-RAY INSPECTION DEVICE

PROCESS MONITORING DEVICE AND PROCESS MONITORING METHOD IN SEMICOND...

ABNORMALITY DETECTION SYSTEM, ABNORMALITY DETECTION METHOD, AND REC...

INFORMATION PROCESSING DEVICE, INFORMATION PROCESSING METHOD AND PR...