Yasuyo Muto

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Tochigi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate holding device
- Patent number 7,425,238
- Issue date Sep 16, 2008
- Canon Kabushiki Kaisha
- Yasuyo Muto
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Stage apparatus, exposure apparatus, and semiconductor device manuf...
- Patent number 6,965,428
- Issue date Nov 15, 2005
- Canon Kabushiki Kaisha
- Yasuyo Muto
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Stage apparatus, exposure apparatus, and semiconductor device manuf...
- Publication number 20060017909
- Publication date Jan 26, 2006
- Canon Kabushiki Kaisha
- Yasuyo Muto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate holding device
- Publication number 20040150172
- Publication date Aug 5, 2004
- Canon Kabushiki Kaisha
- Yasuyo Muto
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Stage apparatus, exposure apparatus, and semiconductor device manuf...
- Publication number 20040124594
- Publication date Jul 1, 2004
- Canon Kabushiki Kaisha
- Yasuyo Muto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY