Yasuyoshi Hyodo

Person

Mie, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Integrated circuit device and method for manufacturing the same
- Patent number 9,466,611
- Issue date Oct 11, 2016
- Kabushiki Kaisha Toshiba
- Yosuke Komori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Non-volatile memory device
- Patent number 8,546,780
- Issue date Oct 1, 2013
- Kabushiki Kaisha Toshiba
- Jun Iijima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming porous insulation film
- Patent number 8,105,661
- Issue date Jan 31, 2012
- ASM Japan K.K.
- Yasuyoshi Hyodo
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Manufacturing method of semiconductor devices
- Patent number 7,906,434
- Issue date Mar 15, 2011
- Kabushiki Kaisha Toshiba
- Junichi Hashimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming silicon-containing insulation film having low die...
- Patent number 7,655,577
- Issue date Feb 2, 2010
- ASM Japan K.K.
- Yasuyoshi Hyodo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming porous insulation film
- Patent number 7,585,789
- Issue date Sep 8, 2009
- ASM Japan K.K.
- Yasuyoshi Hyodo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming silicon-containing insulation film having low die...
- Patent number 7,148,154
- Issue date Dec 12, 2006
- ASM Japan K.K.
- Yasuyoshi Hyodo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming low-k hard film
- Patent number 7,064,088
- Issue date Jun 20, 2006
- ASM Japan K.K.
- Yasuyoshi Hyodo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Insulation film on semiconductor substrate and method for forming same
- Patent number 6,881,683
- Issue date Apr 19, 2005
- ASM Japan K.K.
- Nobuo Matsuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Insulation film on semiconductor substrate and method for forming same
- Patent number 6,852,650
- Issue date Feb 8, 2005
- ASM Japan K.K.
- Nobuo Matsuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for forming low dielectric constant film
- Patent number 6,830,007
- Issue date Dec 14, 2004
- ASM Japan K.K.
- Nobuo Matsuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Insulation film on semiconductor substrate and method for forming same
- Patent number 6,784,123
- Issue date Aug 31, 2004
- ASM Japan K.K.
- Nobuo Matsuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for forming low dielectric constant film
- Patent number 6,537,928
- Issue date Mar 25, 2003
- ASM Japan K.K.
- Nobuo Matsuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
INTEGRATED CIRCUIT DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20160079270
- Publication date Mar 17, 2016
- KABUSHIKI KAISHA TOSHIBA
- Yosuke KOMORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NON-VOLATILE MEMORY DEVICE
- Publication number 20110198554
- Publication date Aug 18, 2011
- Kabushiki Kaisha Toshiba
- Jun Iijima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICES
- Publication number 20100041235
- Publication date Feb 18, 2010
- Junichi Hashimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING POROUS INSULATION FILM
- Publication number 20070161257
- Publication date Jul 12, 2007
- ASM JAPAN K.K.
- Yasuyoshi Hyodo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for forming porous insulation film
- Publication number 20070158013
- Publication date Jul 12, 2007
- Yasuyoshi Hyodo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING SILICON-CONTAINING INSULATION FILM HAVING LOW DIE...
- Publication number 20070111540
- Publication date May 17, 2007
- ASM JAPAN K.K.
- Yasuyoshi Hyodo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING SILICON-CONTAINING INSULATION FILM HAVING LOW DIE...
- Publication number 20070066086
- Publication date Mar 22, 2007
- ASM JAPAN K.K.
- Yasuyoshi Hyodo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of forming silicon-containing insulation film having low die...
- Publication number 20050042884
- Publication date Feb 24, 2005
- ASM JAPAN K.K.
- Yasuyoshi Hyodo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for forming low-k hard film
- Publication number 20040038514
- Publication date Feb 26, 2004
- ASM JAPAN K.K.
- Yasuyoshi Hyodo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Insulation film on semiconductor substrate and method for forming same
- Publication number 20030224622
- Publication date Dec 4, 2003
- ASM JAPAN K.K.
- Nobuo Matsuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Insulation film on semiconductor substrate and method for forming same
- Publication number 20030162408
- Publication date Aug 28, 2003
- ASM JAPAN K.K.
- Nobuo Matsuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and method for forming low dielectric constant film
- Publication number 20030154921
- Publication date Aug 21, 2003
- Nobuo Matsuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Insulation film on semiconductor substrate and method for forming same
- Publication number 20030119336
- Publication date Jun 26, 2003
- Nobuo Matsuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Yasuyoshi Hyodo

Person

Patents Grantslast 30 patents

Integrated circuit device and method for manufacturing the same

Non-volatile memory device

Method for forming porous insulation film

Manufacturing method of semiconductor devices

Method of forming silicon-containing insulation film having low die...

Method for forming porous insulation film

Method of forming silicon-containing insulation film having low die...

Method for forming low-k hard film

Insulation film on semiconductor substrate and method for forming same

Insulation film on semiconductor substrate and method for forming same

Apparatus and method for forming low dielectric constant film

Insulation film on semiconductor substrate and method for forming same

Apparatus and method for forming low dielectric constant film

Patents Applicationslast 30 patents

INTEGRATED CIRCUIT DEVICE AND METHOD FOR MANUFACTURING THE SAME

NON-VOLATILE MEMORY DEVICE

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICES

METHOD FOR FORMING POROUS INSULATION FILM

Method for forming porous insulation film

METHOD OF FORMING SILICON-CONTAINING INSULATION FILM HAVING LOW DIE...

METHOD OF FORMING SILICON-CONTAINING INSULATION FILM HAVING LOW DIE...

Method of forming silicon-containing insulation film having low die...

Method for forming low-k hard film

Insulation film on semiconductor substrate and method for forming same

Insulation film on semiconductor substrate and method for forming same

Apparatus and method for forming low dielectric constant film

Insulation film on semiconductor substrate and method for forming same