Yasuyoshi Imai

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Santa Clara, CA, US

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Patents Applicationslast 30 patents

Information Patent Application
Electrostatic chuck and producing method thereof
- Publication number 20070217117
- Publication date Sep 20, 2007
- NGK Insulators, Ltd.
- Mitsuru Ohta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrostatic chuck and method of manufacturing electrostatic chuck
- Publication number 20060213900
- Publication date Sep 28, 2006
- NGK Insulators, Ltd.
- Hiroto Matsuda
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR