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Yasuyoshi Imai
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Nagoya-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Electrostatic chuck and manufacturing method for the same, and alum...
Patent number
7,416,793
Issue date
Aug 26, 2008
NGK Insulators, Ltd.
Hiroto Matsuda
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Method of fabricating substrate placing stage
Patent number
7,353,979
Issue date
Apr 8, 2008
NGK Insulators, Ltd.
Tomoyuki Fujii
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
Substrate mounting apparatus and control method of substrate temper...
Publication number
20060021705
Publication date
Feb 2, 2006
NGK Insulators, Ltd.
Yasuyoshi Imai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Electrostatic chuck and manufacturing method for the same, and alum...
Publication number
20050152089
Publication date
Jul 14, 2005
NGK Insulators, Ltd.
Hiroto Matsuda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of fabricating substrate placing stage
Publication number
20050118450
Publication date
Jun 2, 2005
NGK Insulators, Ltd.
Tomoyuki Fujii
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR