TREA

Yasuyoshi Ishiyama

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  • Miyagi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma etching method
    • Patent number 8,975,191
    • Issue date Mar 10, 2015
    • Tokyo Electron Limited
    • Kazuhito Tohnoe
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA ETCHING METHOD
    • Publication number 20140045338
    • Publication date Feb 13, 2014
    • TOKYO ELECTRON LIMITED
    • Kazuhito Tohnoe
    • H01 - BASIC ELECTRIC ELEMENTS