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Yasuyoshi Kitazawa
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Aichi, JP
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Patents Grants
last 30 patents
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Patent Grant
Wafer transport apparatus
Patent number
9,159,600
Issue date
Oct 13, 2015
Sinfonia Technology Co., Ltd.
Takumi Mizokawa
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Vacuum processing apparatus
Patent number
8,522,958
Issue date
Sep 3, 2013
Tokyo Electron Limited
Yasuhiro Tobe
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Patents Applications
last 30 patents
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Patent Application
WAFER TRANSPORT APPARATUS
Publication number
20130183122
Publication date
Jul 18, 2013
SINFONIA TECHNOLOGY CO., LTD.
Takumi Mizokawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM PROCESSING APPARATUS
Publication number
20110076119
Publication date
Mar 31, 2011
Yasuhiro Tobe
H01 - BASIC ELECTRIC ELEMENTS