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Yasuyoshi Kuroka
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Fukushima, JP
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last 30 patents
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Patent Grant
Method of and apparatus for mirror-like polishing wafer chamfer wit...
Patent number
6,332,828
Issue date
Dec 25, 2001
Shin-Etsu Handotai Co., Ltd.
Fumihiko Hasegawa
B24 - GRINDING POLISHING
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Patent Grant
Method of and apparatus for mirror-like polishing wafer chamfer wit...
Patent number
6,113,463
Issue date
Sep 5, 2000
Shin-Etsu Handotai Co., Ltd.
Fumihiko Hasegawa
B24 - GRINDING POLISHING