Yasuyoshi Yamada

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure unit, exposure system and device manufacturing method
- Patent number 6,185,474
- Issue date Feb 6, 2001
- Canon Kabushiki Kaisha
- Takashi Nakamura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask aligner with a wafer position detecting device
- Patent number 4,794,648
- Issue date Dec 27, 1988
- Canon Kabushiki Kaisha
- Naoki Ayata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask aligner having a photo-mask setting device
- Patent number 4,655,599
- Issue date Apr 7, 1987
- Canon Kabushiki Kaisha
- Naoki Ayata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detection signal processing apparatus
- Patent number 4,599,000
- Issue date Jul 8, 1986
- Canon Kabushiki Kaisha
- Yasuyoshi Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for automatic alignment
- Patent number 4,563,094
- Issue date Jan 7, 1986
- Canon Kabushiki Kaisha
- Yasuyoshi Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for processing a signal for aligning
- Patent number 4,515,481
- Issue date May 7, 1985
- Canon Kabushiki Kaisha
- Yasuyoshi Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for processing a signal for alignment
- Patent number 4,487,505
- Issue date Dec 11, 1984
- Canon Kabushiki Kaisha
- Shigeki Nakano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Yasuyoshi Yamada

Person

Patents Grantslast 30 patents

Exposure unit, exposure system and device manufacturing method

Mask aligner with a wafer position detecting device

Mask aligner having a photo-mask setting device

Position detection signal processing apparatus

Method and apparatus for automatic alignment

Apparatus for processing a signal for aligning

Apparatus for processing a signal for alignment