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Plasma processing apparatus
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Patent number 7,395,779
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Issue date Jul 8, 2008
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Tokyo Electron Limited
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Nobuo Ishii
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Plasma processing apparatus
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Patent number 6,953,908
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Issue date Oct 11, 2005
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Tokyo Electron Limited
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Nobuo Ishii
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Plasma processing system
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Patent number 6,823,816
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Issue date Nov 30, 2004
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Tokyo Electron Limited
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Nobuo Ishii
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H01 - BASIC ELECTRIC ELEMENTS
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Plasma processing apparatus
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Patent number 6,713,968
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Issue date Mar 30, 2004
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Tokyo Electron Limited
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Nobuo Ishii
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H01 - BASIC ELECTRIC ELEMENTS
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Plasma processing apparatus
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Patent number 6,695,948
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Issue date Feb 24, 2004
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Tokyo Electron Limited
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Nobuo Ishii
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H01 - BASIC ELECTRIC ELEMENTS
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Plasma processing apparatus
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Patent number 6,622,650
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Issue date Sep 23, 2003
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Tokyo Electron Limited
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Nobuo Ishii
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H01 - BASIC ELECTRIC ELEMENTS
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Plasma processing apparatus
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Patent number 6,527,909
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Issue date Mar 4, 2003
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Tokyo Electron Limited
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Nobuo Ishii
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H01 - BASIC ELECTRIC ELEMENTS
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Plasma processing method and apparatus
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Patent number 6,311,638
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Issue date Nov 6, 2001
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Tokyo Electron Limited
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Nobuo Ishii
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...