Yasuyuki IDO

Follow

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate liquid processing apparatus having nozzle with multiple f...
- Patent number 9,922,849
- Issue date Mar 20, 2018
- Tokyo Electron Limited
- Yasuyuki Ido
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS AND SUBSTRATE LIQUID PROCESSI...
- Publication number 20150318183
- Publication date Nov 5, 2015
- TOKYO ELECTRON LIMITED
- Yasuyuki Ido
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING METHOD AND FILM DEPOSITING METHOD
- Publication number 20120269970
- Publication date Oct 25, 2012
- TOKYO ELECTRON LIMITED
- Yasuyuki IDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...