Yasuyuki KAGAYA

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Nirasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate stage
- Patent number 11,862,488
- Issue date Jan 2, 2024
- Tokyo Electron Limited
- Masamichi Hara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage mechanism, processing apparatus, and method of operating the...
- Patent number 11,282,733
- Issue date Mar 22, 2022
- Tokyo Electron Limited
- Yuuki Motomura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PLACING METHOD AND SUBSTRATE PLACING MECHANISM
- Publication number 20230122317
- Publication date Apr 20, 2023
- TOKYO ELECTRON LIMITED
- Koichi NAKAJIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE STAGE
- Publication number 20200335365
- Publication date Oct 22, 2020
- TOKYO ELECTRON LIMITED
- Masamichi Hara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE MECHANISM, PROCESSING APPARATUS, AND METHOD OF OPERATING THE...
- Publication number 20200035537
- Publication date Jan 30, 2020
- TOKYO ELECTRON LIMITED
- Yuuki MOTOMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...