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Yasuyuki Kawagoe
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Amagasaki, JP
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last 30 patents
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Patent Grant
Thin film deposition apparatus
Patent number
4,811,690
Issue date
Mar 14, 1989
Mitsubishi Denki Kabushiki Kaisha
Yasuyuki Kawagoe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...