Yasuyuki Kobayakawa

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Processing solution preparation and supply method and apparatus
- Patent number 7,101,517
- Issue date Sep 5, 2006
- Nagase & Co., Ltd.
- Toshimoto Nakagawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Developer waste liquid regenerating apparatus and method
- Patent number 6,875,359
- Issue date Apr 5, 2005
- Nagase & Co., Ltd.
- Shu Ogawa
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
Developer waste liquid regenerating apparatus and method
- Publication number 20040099602
- Publication date May 27, 2004
- Shu Ogawa
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Resist stripping equipment
- Publication number 20040011463
- Publication date Jan 22, 2004
- Toshimoto Nakagawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Regenerating apparatus and method for resist stripping waste liquids
- Publication number 20030141246
- Publication date Jul 31, 2003
- Shu Ogawa
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Processing solution preparation and supply method and apparatus
- Publication number 20030136763
- Publication date Jul 24, 2003
- Toshimoto Nakagawa
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR