Yasuyuki Shirai

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Vacuum processing apparatus, method of controlling vacuum processin...
- Patent number 8,308,440
- Issue date Nov 13, 2012
- Canon Anelva Corporation
- Yasuyuki Shirai
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Substrate support device and plasma processing apparatus
- Patent number 8,252,118
- Issue date Aug 28, 2012
- Canon Anelva Corporation
- Yohsuke Shibuya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mechanism and method for mechanically removing a substrate
- Patent number 5,569,350
- Issue date Oct 29, 1996
- Anelva Corporation
- Tomoaki Osada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus including wafer transporting and sub...
- Patent number 4,747,928
- Issue date May 31, 1988
- Anelva Corporation
- Nobuyuki Takahashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Automatic loader
- Patent number 4,643,629
- Issue date Feb 17, 1987
- Anelva Corporation
- Nobuyuki Takahashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE SUPPORT DEVICE AND PLASMA PROCESSING APPARATUS
- Publication number 20090308537
- Publication date Dec 17, 2009
- Canon ANELVA Corporation
- Yohsuke Shibuya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM PROCESSING APPARATUS, METHOD OF CONTROLLING VACUUM PROCESSIN...
- Publication number 20090229688
- Publication date Sep 17, 2009
- Canon ANELVA Corporation
- Yasuyuki Shirai
- H01 - BASIC ELECTRIC ELEMENTS