Yasuyuki Unno

Person

Tochigi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Detection apparatus, lithography apparatus, and article manufacturi...
- Patent number 12,326,668
- Issue date Jun 10, 2025
- Canon Kabushiki Kaisha
- Ryo Nakayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Detector that detects relative positions of marks while blocking no...
- Patent number 12,098,913
- Issue date Sep 24, 2024
- Canon Kabushiki Kaisha
- Takamitsu Komaki
- G01 - MEASURING TESTING
Information Patent Grant
Detection device, imprint apparatus, planarization device, detectio...
- Patent number 10,777,440
- Issue date Sep 15, 2020
- Canon Kabushiki Kaisha
- Toshiki Iwai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical system for a holographic microscope including a spatial filter
- Patent number 9,360,423
- Issue date Jun 7, 2016
- Canon Kabushiki Kaisha
- Chung-Chieh Yu
- G01 - MEASURING TESTING
Information Patent Grant
Method and device of measuring wavefront aberration, method of manu...
- Patent number 9,347,853
- Issue date May 24, 2016
- Canon Kabushiki Kaisha
- Yasuyuki Unno
- G01 - MEASURING TESTING
Information Patent Grant
Method and device of measuring wavefront aberration, method of manu...
- Patent number 9,170,171
- Issue date Oct 27, 2015
- Canon Kabushiki Kaisha
- Yasuyuki Unno
- G01 - MEASURING TESTING
Information Patent Grant
Wavefront optical measuring apparatus
- Patent number 9,091,614
- Issue date Jul 28, 2015
- Canon Kabushiki Kaisha
- Akinori Ohkubo
- G01 - MEASURING TESTING
Information Patent Grant
Interferometric method and digital holographic microscope
- Patent number 8,896,840
- Issue date Nov 25, 2014
- Canon Kabushiki Kaisha
- Isao Matsubara
- G01 - MEASURING TESTING
Information Patent Grant
Optical element and manufacturing method therefor
- Patent number 7,262,920
- Issue date Aug 28, 2007
- Canon Kabushiki Kaisha
- Yasuyuki Unno
- G02 - OPTICS
Information Patent Grant
Optical element and manufacturing method thereof
- Patent number 7,102,828
- Issue date Sep 5, 2006
- Canon Kabushiki Kaisha
- Yasuyuki Unno
- G02 - OPTICS
Information Patent Grant
Projection optical system and projection exposure apparatus having...
- Patent number 6,829,041
- Issue date Dec 7, 2004
- Canon Kabushiki Kaisha
- Yasuyuki Unno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for making element
- Patent number 6,641,985
- Issue date Nov 4, 2003
- Canon Kabushiki Kaisha
- Yasuyuki Unno
- G02 - OPTICS
Information Patent Grant
Image processing system and method using system characteristic and...
- Patent number 6,476,869
- Issue date Nov 5, 2002
- Canon Kabushiki Kaisha
- Masayoshi Sekine
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Optical diffraction device and exposure apparatus
- Patent number 6,327,086
- Issue date Dec 4, 2001
- Canon Kabushiki Kaisha
- Yasuyuki Unno
- G02 - OPTICS
Information Patent Grant
Optical element manufacturing system, an illumination system, and a...
- Patent number 6,301,001
- Issue date Oct 9, 2001
- Canon Kabushiki Kaisha
- Yasuyuki Unno
- G02 - OPTICS
Information Patent Grant
Optical element manufacturing method
- Patent number 6,120,950
- Issue date Sep 19, 2000
- Canon Kabushiki Kaisha
- Yasuyuki Unno
- G02 - OPTICS
Information Patent Grant
Photomask and scanning exposure apparatus and device manufacturing...
- Patent number 6,077,631
- Issue date Jun 20, 2000
- Canon Kabushiki Kaisha
- Yasuyuki Unno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Multilevel optical diffraction device with antireflection film and...
- Patent number 5,995,285
- Issue date Nov 30, 1999
- Canon Kabushiki Kaisha
- Yasuyuki Unno
- G02 - OPTICS
Information Patent Grant
Projection optical system, exposure apparatus and semiconductor-dev...
- Patent number 5,953,106
- Issue date Sep 14, 1999
- Canon Kabushiki Kaisha
- Yasuyuki Unno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus and device manufacturing method capab...
- Patent number 5,933,219
- Issue date Aug 3, 1999
- Canon Kabushiki Kaisha
- Yasuyuki Unno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scanning type exposure apparatus and device manufacturing method
- Patent number 5,872,617
- Issue date Feb 16, 1999
- Canon Kabushiki Kaisha
- Yasuyuki Unno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus and microdevice manufacturing method
- Patent number 5,805,273
- Issue date Sep 8, 1998
- Canon Kabushiki Kaisha
- Yasuyuki Unno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scan type projection exposure apparatus and microdevice manufacturi...
- Patent number 5,706,077
- Issue date Jan 6, 1998
- Canon Kabushiki Kaisha
- Yasuyuki Unno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Image projection method and device manufacturing method using the i...
- Patent number 5,459,000
- Issue date Oct 17, 1995
- Canon Kabushiki Kaisha
- Yasuyuki Unno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus with an aberration compensation devic...
- Patent number 5,184,176
- Issue date Feb 2, 1993
- Canon Kabushiki Kaisha
- Yasuyuki Unno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
DETECTION DEVICE, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING...
- Publication number 20240027926
- Publication date Jan 25, 2024
- Canon Kabushiki Kaisha
- SHUN TODA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DETECTION DEVICE, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING...
- Publication number 20240027921
- Publication date Jan 25, 2024
- Canon Kabushiki Kaisha
- TOSHIKI IWAI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DETECTION APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURI...
- Publication number 20220236650
- Publication date Jul 28, 2022
- Canon Kabushiki Kaisha
- Ryo Nakayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DETECTOR, IMPRINT APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20210372776
- Publication date Dec 2, 2021
- Canon Kabushiki Kaisha
- Takamitsu Komaki
- G01 - MEASURING TESTING
Information Patent Application
DETECTION DEVICE, IMPRINT APPARATUS, PLANARIZATION DEVICE, DETECTIO...
- Publication number 20190371642
- Publication date Dec 5, 2019
- Canon Kabushiki Kaisha
- Toshiki Iwai
- G01 - MEASURING TESTING
Information Patent Application
OBJECTIVE OPTICAL SYSTEM AND IMAGE ACQUISITION APPARATUS
- Publication number 20150130922
- Publication date May 14, 2015
- Canon Kabushiki Kaisha
- Kazumasa Tanaka
- G02 - OPTICS
Information Patent Application
METHOD AND DEVICE OF MEASURING WAVEFRONT ABERRATION, METHOD OF MANU...
- Publication number 20140139826
- Publication date May 22, 2014
- Canon Kabushiki Kaisha
- Yasuyuki Unno
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND DEVICE OF MEASURING WAVEFRONT ABERRATION, METHOD OF MANU...
- Publication number 20140139825
- Publication date May 22, 2014
- Canon Kabushiki Kaisha
- Yasuyuki Unno
- G01 - MEASURING TESTING
Information Patent Application
INTERFEROMETRIC METHOD AND DIGITAL HOLOGRAPHIC MICROSCOPE
- Publication number 20130286403
- Publication date Oct 31, 2013
- THE ARIZONA BOARD OF REGENTS ON BEHALF OF THE UNIVERSITY OF ARIZONA
- Isao Matsubara
- G02 - OPTICS
Information Patent Application
OPTICAL SYSTEM FOR A HOLOGRAPHIC MICROSCOPE
- Publication number 20130003073
- Publication date Jan 3, 2013
- Canon Kabushiki Kaisha
- Chung-Chieh Yu
- G02 - OPTICS
Information Patent Application
WAVEFRONT OPTICAL MEASURING APPARATUS
- Publication number 20120296591
- Publication date Nov 22, 2012
- Canon Kabushiki Kaisha
- Akinori Ohkubo
- G01 - MEASURING TESTING
Information Patent Application
Projection optical system and projection exposure apparatus having...
- Publication number 20040263814
- Publication date Dec 30, 2004
- Canon Kabushiki Kaisha
- Yasuyuki Unno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optical element and manufacturing method therefor
- Publication number 20040136084
- Publication date Jul 15, 2004
- Yasuyuki Unno
- C30 - CRYSTAL GROWTH
Information Patent Application
Projection optical system and projection exposure apparatus having...
- Publication number 20030128349
- Publication date Jul 10, 2003
- Yasuyuki Unno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR MAKING ELEMENT
- Publication number 20030064295
- Publication date Apr 3, 2003
- UNNO YASUYUKI
- G02 - OPTICS
Information Patent Application
Optical element and manufacturing method thereof
- Publication number 20030000453
- Publication date Jan 2, 2003
- Yasuyuki Unno
- C30 - CRYSTAL GROWTH

Yasuyuki Unno

Person

Patents Grantslast 30 patents

Detection apparatus, lithography apparatus, and article manufacturi...

Detector that detects relative positions of marks while blocking no...

Detection device, imprint apparatus, planarization device, detectio...

Optical system for a holographic microscope including a spatial filter

Method and device of measuring wavefront aberration, method of manu...

Method and device of measuring wavefront aberration, method of manu...

Wavefront optical measuring apparatus

Interferometric method and digital holographic microscope

Optical element and manufacturing method therefor

Optical element and manufacturing method thereof

Projection optical system and projection exposure apparatus having...

Method for making element

Image processing system and method using system characteristic and...

Optical diffraction device and exposure apparatus

Optical element manufacturing system, an illumination system, and a...

Optical element manufacturing method

Photomask and scanning exposure apparatus and device manufacturing...

Multilevel optical diffraction device with antireflection film and...

Projection optical system, exposure apparatus and semiconductor-dev...

Projection exposure apparatus and device manufacturing method capab...

Scanning type exposure apparatus and device manufacturing method

Projection exposure apparatus and microdevice manufacturing method

Scan type projection exposure apparatus and microdevice manufacturi...

Image projection method and device manufacturing method using the i...

Projection exposure apparatus with an aberration compensation devic...

Patents Applicationslast 30 patents

DETECTION DEVICE, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING...

DETECTION DEVICE, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING...

DETECTION APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURI...

DETECTOR, IMPRINT APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

DETECTION DEVICE, IMPRINT APPARATUS, PLANARIZATION DEVICE, DETECTIO...

OBJECTIVE OPTICAL SYSTEM AND IMAGE ACQUISITION APPARATUS

METHOD AND DEVICE OF MEASURING WAVEFRONT ABERRATION, METHOD OF MANU...

METHOD AND DEVICE OF MEASURING WAVEFRONT ABERRATION, METHOD OF MANU...

INTERFEROMETRIC METHOD AND DIGITAL HOLOGRAPHIC MICROSCOPE

OPTICAL SYSTEM FOR A HOLOGRAPHIC MICROSCOPE

WAVEFRONT OPTICAL MEASURING APPARATUS

Projection optical system and projection exposure apparatus having...

Optical element and manufacturing method therefor

Projection optical system and projection exposure apparatus having...

METHOD FOR MAKING ELEMENT

Optical element and manufacturing method thereof